Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism

{
  "publication_number": "US10253777B2",
  "country": "US",
  "kind": "B2",
  "title": "Thread groove pump mechanism, vacuum pump including thread groove pump mechanism, and rotor, outer circumference side stator, and inner circumference side stator used in thread groove pump mechanism",
  "abstract": "The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.",
  "claims": [
    "1. A co-flow thread groove pump mechanism comprising: a rotor cylinder portion rotatable in a predetermined rotating direction; an outer circumference side stator having a substantially cylindrical shape and disposed coaxially with the rotor cylinder portion on an outer circumference side of the rotor cylinder portion; an inner circumference side stator having a substantially cylindrical shape and disposed coaxially with the rotor cylinder portion on an inner circumference side of the rotor cylinder portion; an outer-circumference-side thread groove portion engraved on one of opposite surfaces of the rotor cylinder portion and the outer circumference side stator; and an inner-circumference-side thread groove portion engraved on one of opposite surfaces of the rotor cylinder portion and the inner circumference side stator, wherein a configuration of the outer-circumference-side thread groove portion differs from a configuration of the inner-circumference-side thread groove portion such that an exhaust side pressure of the outer-circumference-side thread groove portion is set to be substantially equal to an exhaust side pressure of the inner-circumference-side thread groove portion.",
    "2. The co-flow thread groove pump mechanism according to claim 1, wherein the rotor cylinder portion is provided in a rotor, and a ratio of a root width of the inner-circumference-side thread groove portion and a ridge width of an inner-circumference-side thread ridge portion extended between the inner-circumference-side thread groove portions is set to be smaller than a ratio of a root width of the outer-circumference-side thread groove portion and a ridge width of an outer-circumference-side thread ridge portion extended between the outer-circumference-side thread groove portions.",
    "3. The co-flow thread groove pump mechanism according to claim 2, wherein a ratio of the ratio of the root width of the inner-circumference-side thread groove portion and the ridge width of the inner-circumference-side thread ridge portion and the ratio of the root width of the outer-circumference-side thread groove portion and the ridge width of the outer-circumference-side thread ridge portion substantially coincides with a ratio of a gas exhaust flow rate of the outer-circumference-side thread groove portion and a gas exhaust flow rate of the inner-circumference-side thread groove portion.",
    "4. The co-flow thread groove pump mechanism according to claim 2, wherein the ratio of the root width of the inner-circumference-side thread groove portion and the ridge width of the inner-circumference-side thread ridge portion, and the ratio of the root width of the outer-circumference-side thread groove portion and the ridge width of the outer-circumference-side thread ridge portion satisfy a relational expression described below: (A 1/ B 1)/(A 2/ B 2)≤3 A 1: the root width of the outer-circumference-side thread groove portion B 1: the ridge width of the outer-circumference-side thread ridge portion A 2: the root width of the inner-circumference-side thread groove portion B 2: the ridge width of the inner-circumference-side thread ridge portion.",
    "5. The co-flow thread groove pump mechanism according to claim 2, wherein the ratio of the root width of the inner-circumference-side thread groove portion and the ridge width of the inner-circumference-side thread ridge portion, and the ratio of the root width of the outer-circumference-side thread groove portion and the ridge width of the outer-circumference-side thread ridge portion satisfy a relational expression described below: 2≤(A 1/ B 1)/(A 2/ B 2) A 1: the root width of the outer-circumference-side thread groove portion B 1: the ridge width of the outer-circumference-side thread ridge portion A 2: the root width of the inner-circumference-side thread groove portion B 2: the ridge width of the inner-circumference-side thread ridge portion.",
    "6. The co-flow thread groove pump mechanism according to claim 1, wherein a plurality of the outer-circumference-side thread groove portions are engraved on at least one of an outer circumferential surface of the rotor cylinder portion and an opposite surface of the outer circumference side stator opposed to the outer circumferential surface of the rotor cylinder portion, a plurality of the inner-circumference-side thread groove portions are engraved on at least one of an inner circumferential surface of the rotor cylinder portion and an opposite surface of the inner circumference side stator opposed to the inner circumferential surface of the rotor cylinder portion, and a back pressure characteristic indicating a relation between an intake side pressure and an exhaust side pressure is set to be substantially equal for the plurality of the outer-circumference-side thread groove portions and the plurality of the inner-circumference-side thread groove portions.",
    "7. The co-flow thread groove pump mechanism according to claim 6, wherein an angle of elevation of an inner-circumference-side thread ridge portion extended between the plurality of the inner-circumference-side thread groove portions is set to be smaller than an angle of elevation of an outer-circumference-side thread ridge portion extended between the plurality of the outer-circumference-side thread groove portions.",
    "8. The co-flow thread groove pump mechanism according to claim 6, wherein the number of ridges of an inner-circumference-side thread ridge portion extended between the plurality of the inner-circumference-side thread groove portions is set to be larger than the number of ridges of an outer-circumference-side thread ridge portion extended between the plurality of the outer-circumference-side thread groove portions.",
    "9. The co-flow thread groove pump mechanism according to claim 6, wherein a groove depth of the inner-circumference-side thread groove portion is set to be smaller than a groove depth of the outer-circumference-side thread groove portion.",
    "10. The co-flow thread groove pump mechanism according to claim 6, wherein a clearance between an inner-circumference-side thread ridge portion extended between the plurality of the inner-circumference-side thread groove portions and the inner circumference side stator or the rotor cylinder portion is set to be smaller than a clearance between an outer-circumference-side thread ridge portion extended between the plurality of the outer-circumference-side thread groove portions and the outer circumference side stator or the rotor cylinder portion.",
    "11. The co-flow thread groove pump mechanism according to claim 6, wherein a total inlet area of the plurality of the inner-circumference-side thread groove portions is set to be larger than a total opening area of connection holes drilled in the rotor cylinder portion.",
    "12. A vacuum pump comprising the co-flow thread groove pump mechanism according to claim 1.",
    "13. A rotor used in the co-flow thread groove pump mechanism according to claim 1.",
    "14. The rotor according to claim 13, wherein a ratio of a root width of the outer-circumference-side thread groove portion and a ridge width of an outer-circumference-side thread ridge portion extended between the outer-circumference-side thread groove portions is set to be larger than a ratio of a root width of the inner-circumference-side thread groove portion engraved on one of the opposite surfaces of the rotor cylinder portion and the inner circumference side stator and a ridge width of an inner-circumference-side thread ridge portion extended between the inner-circumference-side thread groove portions.",
    "15. An outer circumference side stator used in the co-flow thread groove pump mechanism according to claim 1.",
    "16. The outer circumference side stator according to claim 15, wherein a ratio of a root width of the outer-circumference-side thread groove portion and a ridge width of an outer-circumference-side thread ridge portion extended between the outer-circumference-side thread groove portions is set to be larger than a ratio of a root width of the inner-circumference-side thread groove portion engraved on one of the opposite surfaces of the rotor cylinder portion and the inner circumference side stator and a ridge width of an inner-circumference-side thread ridge portion extended between the inner-circumference-side thread groove portions.",
    "17. An inner circumference side stator used in the co-flow thread groove pump mechanism according to claim 1."
  ],
  "description_excerpt": "1. Field of the Invention\n\nThe present invention relates to a thread groove pump mechanism of a vacuum pump, a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism and, more particularly, to a thread groove pump mechanism of a vacuum pump usable in a pressure range of medium vacuum to ultra-high vacuum, a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism.\n\n2. Description of the Related Art\n\nWhen a semiconductor device such as a memory or an integrated circuit is manufactured, it is necessary to perform doping and etching on a high-purity semiconductor substrate (wafer) in a chamber in a high vacuum state in order to avoid influence due to dust and the like in the air. A vacuum pump such as a turbo molecular pump is used for exhaust in the chamber.\n\nAs a vacuum pump used conventionally, there is known a combination pump including a turbo molecular pump mechanism A and a thread groove pump mechanism 200 provided below the turbo molecular pump A as shown in FIG. 10.",
  "cpc": [
    "F04D 19/044",
    "F04D 19/042",
    "F04D 19/046",
    "F04D 29/002",
    "F04D 29/28",
    "F04D 29/403"
  ],
  "ipc": [
    "F04D 19/04"
  ],
  "assignees": [
    "Edwards Japan Ltd"
  ],
  "inventors": [
    "Yoshiyuki Sakaguchi",
    "Akihiko Wada",
    "Takashi Kabasawa"
  ],
  "filing_date": "2014-09-01",
  "publication_date": "2019-04-09",
  "grant_date": "2019-04-09",
  "priority_date": "2013-09-30",
  "application_number": "US-201415021499-A",
  "family_id": "52742897",
  "cited_by_count": 2,
  "citations": [
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    "JPH0538389U",
    "JPH0542695U",
    "JP2003028090A",
    "JP2003065281A",
    "EP1318309A2",
    "JP2003172289A",
    "US6779969B2",
    "WO2012043035A1"
  ]
}