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Patent · US11953351B2 · B2 · US

Tactile and proximity sensor

(11) Publication number
US11953351B2
(21) Application number
17/347,701
(22) Filing date
2021-06-15
(30) Priority date
2019-02-15
(43) Publication date
2024-04-09
(45) Date of grant
2024-04-09
(51) IPC
G01B 11/16; G01C 3/00; G01D 5/26
(52) CPC
  • G01D Measuring not specially adapted for a specific variable; arrangements for measuring two or more variables not covered in a single other subclass; tariff metering apparatus; measuring or testing not otherwise provided for: 5/26, 5/30
  • G01B Measuring length, thickness or similar linear dimensions; measuring angles; measuring areas; measuring irregularities of surfaces or contours: 11/026, 11/16
  • G01C Measuring distances, levels or bearings; surveying; navigation; gyroscopic instruments; photogrammetry or videogrammetry: 3/00
  • G01L Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure: 1/24
(73) Assignee
Murata Manufacturing Co Ltd
(72) Inventors
Takatoshi Kato; Hiroshi Watanabe; Kohei SUGAHARA
(54) Title
Tactile and proximity sensor
(57) Abstract

A tactile and proximity sensor includes a light source, a light receiver, an elastic structure, and a reflecting mirror. The light source emits light. The light receiver receives light and generates a signal indicating a result of reception of the light. The elastic structure includes an elastic body deformable in response to an external force and includes a reflecting portion to reflect light and transmitting portions to transmit light. The reflecting mirror faces the light source to guide the light from the light source to the reflecting portion and the transmitting portion.

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Claims (20)

  1. A tactile and proximity sensor for sensing contact with and proximity to an object corresponding to a result of reception of light, the tactile and proximity sensor comprising: a light source to emit light; a light receiver to receive light and generate a signal indicating a result of reception of the light; an elastic structure that includes an elastic body that is deformable in response to an external force and that includes a reflecting portion to reflect light and a transmitting portion to transmit light; and a first reflecting mirror that faces the light source to guide the light from the light source to the reflecting portion and the transmitting portion.
  2. The tactile and proximity sensor according to claim 1, wherein the first reflecting mirror has a concave shape to collimate or concentrate the light from the light source.
  3. The tactile and proximity sensor according to claim 1, further comprising a second reflecting mirror that faces the light receiver to guide light to the light receiver.
  4. The tactile and proximity sensor according to claim 1, further comprising: a substrate between the elastic structure and the first reflecting mirror and including a main surface on a side of the elastic structure and a main surface on a first reflecting mirror side; wherein the light source is provided on the main surface of the substrate on a side of the first reflecting mirror.
  5. The tactile and proximity sensor according to claim 4, wherein the light receiver is provided on the main surface of the substrate on the side of the elastic structure.
  6. The tactile and proximity sensor according to claim 4, wherein the light receiver is provided on the main surface of the substrate on the side of the first reflecting mirror.
  7. The tactile and proximity sensor according to claim 1, wherein the transmitting portion includes a first transmission region, through which the light emitted by the light source and emitted to outside passes, and a second transmission region, through which light incident to the light receiver from outside passes.
  8. The tactile and proximity sensor according to claim 1, further comprising: a modulation circuit to modulate light to be emitted from the light source; and a detection circuit to detect, based on a signal from the light receiver, a result of reception of the light modulated by the modulation circuit.
  9. The tactile and proximity sensor according to claim 1, wherein the light source includes a light emitting diode.
  10. The tactile and proximity sensor according to claim 1, wherein the light receiver includes a photodiode.
  11. The tactile and proximity sensor according to claim 1, wherein the elastic structure includes a plurality of the elastic bodies.
  12. The tactile and proximity sensor according to claim 1, wherein the light source includes at least one solid-state light emitting element or at least one semiconductor laser diode.
  13. The tactile and proximity sensor according to claim 1, wherein the light receiver includes a position sensitive detector or a CMOS image sensor.
  14. The tactile and proximity sensor according to claim 1, wherein the light receiver includes a linear array of light receiving elements or a two-dimensional array of light receiving elements.
  15. The tactile and proximity sensor according to claim 8, wherein the light source driving circuit includes a modulator of AM modulation.
  16. The tactile and proximity sensor according to claim 8, wherein the detection circuit includes a filter to allow a signal component including a modulation frequency of detection light to pass through or a synchronous detection element.
  17. The tactile and proximity sensor according to claim 4, wherein the substrate is made of any of glass, acrylic, polycarbonate, polyimide, silicon, or gallium arsenide.
  18. The tactile and proximity sensor according to claim 1, wherein the elastic structure includes a plurality of transparent layer, a reflector, and a shadow mask.
  19. The tactile and proximity sensor according to claim 1, further comprising a plurality of the light receivers and a plurality of concave mirrors facing the plurality of light receivers.
  20. The tactile and proximity sensor according to claim 1, wherein the elastic structure includes a spring structure.

Description

The present invention relates to a tactile and proximity sensor.

In recent years, various sensors are proposed which are mounted on robot hands or the like and capable of performing various types of sensing including tactile sensing (for example, Japanese Patent No. 5089774, Japanese Patent No. 5825604 and International Publication No. 2014/045685).

Japanese Patent No. 5089774 discloses a composite sensor to be attached to a fingertip surface of a robot hand for performing gripping operation on an object or the like. The composite sensor of Japanese Patent No. 5089774 has a tactile sensor provided with a pressure-sensitive sheet and a proximity sensor constituted of a reflective photosensor. The composite sensor of Japanese Patent No. 5089774 is configured by combining two sensors such that a detection surface of the proximity sensor is defined by the pressure-sensitive sheet.

Japanese Patent No. 5825604 discloses an optical tactile sensor capable of measuring six-axis force. International Publication No. 2014/045685 discloses a force sensor that detects a shearing force using a variable frame. In Japanese Patent No. 5825604 and International Publication No. 2014/045685, in an optical mechanism utilizing deformation of an elastic body, tactile sensing is performed to sense various contact forces by an object.

In the related art, there has been a problem that when proximity sensing is performed together with tactile sensing, a device configuration is large by mounting sensors separately and a sensing mechanism is complicated by requiring a complicated detection principle.

Citations (21)

  • JP2007071564A
  • US20100108870A1
  • US8749522B2
  • US20110067504A1
  • JP5089774B2
  • US20130036829A1
  • US20120330190A1
  • JP2013007744A
  • US9510786B2
  • JP2015500057A
  • US20140309550A1
  • US20150177082A1
  • WO2014045685A1
  • JP2016512772A
  • US20160228071A1
  • US9962127B2
  • CN108323194A
  • US20170161540A1
  • CN109155628A
  • US20190285735A1
  • US20170363464A1
Record as JSON
{
  "publication_number": "US11953351B2",
  "country": "US",
  "kind": "B2",
  "title": "Tactile and proximity sensor",
  "abstract": "A tactile and proximity sensor includes a light source, a light receiver, an elastic structure, and a reflecting mirror. The light source emits light. The light receiver receives light and generates a signal indicating a result of reception of the light. The elastic structure includes an elastic body deformable in response to an external force and includes a reflecting portion to reflect light and transmitting portions to transmit light. The reflecting mirror faces the light source to guide the light from the light source to the reflecting portion and the transmitting portion.",
  "claims": [
    "1. A tactile and proximity sensor for sensing contact with and proximity to an object corresponding to a result of reception of light, the tactile and proximity sensor comprising: a light source to emit light; a light receiver to receive light and generate a signal indicating a result of reception of the light; an elastic structure that includes an elastic body that is deformable in response to an external force and that includes a reflecting portion to reflect light and a transmitting portion to transmit light; and a first reflecting mirror that faces the light source to guide the light from the light source to the reflecting portion and the transmitting portion.",
    "2. The tactile and proximity sensor according to claim 1, wherein the first reflecting mirror has a concave shape to collimate or concentrate the light from the light source.",
    "3. The tactile and proximity sensor according to claim 1, further comprising a second reflecting mirror that faces the light receiver to guide light to the light receiver.",
    "4. The tactile and proximity sensor according to claim 1, further comprising: a substrate between the elastic structure and the first reflecting mirror and including a main surface on a side of the elastic structure and a main surface on a first reflecting mirror side; wherein the light source is provided on the main surface of the substrate on a side of the first reflecting mirror.",
    "5. The tactile and proximity sensor according to claim 4, wherein the light receiver is provided on the main surface of the substrate on the side of the elastic structure.",
    "6. The tactile and proximity sensor according to claim 4, wherein the light receiver is provided on the main surface of the substrate on the side of the first reflecting mirror.",
    "7. The tactile and proximity sensor according to claim 1, wherein the transmitting portion includes a first transmission region, through which the light emitted by the light source and emitted to outside passes, and a second transmission region, through which light incident to the light receiver from outside passes.",
    "8. The tactile and proximity sensor according to claim 1, further comprising: a modulation circuit to modulate light to be emitted from the light source; and a detection circuit to detect, based on a signal from the light receiver, a result of reception of the light modulated by the modulation circuit.",
    "9. The tactile and proximity sensor according to claim 1, wherein the light source includes a light emitting diode.",
    "10. The tactile and proximity sensor according to claim 1, wherein the light receiver includes a photodiode.",
    "11. The tactile and proximity sensor according to claim 1, wherein the elastic structure includes a plurality of the elastic bodies.",
    "12. The tactile and proximity sensor according to claim 1, wherein the light source includes at least one solid-state light emitting element or at least one semiconductor laser diode.",
    "13. The tactile and proximity sensor according to claim 1, wherein the light receiver includes a position sensitive detector or a CMOS image sensor.",
    "14. The tactile and proximity sensor according to claim 1, wherein the light receiver includes a linear array of light receiving elements or a two-dimensional array of light receiving elements.",
    "15. The tactile and proximity sensor according to claim 8, wherein the light source driving circuit includes a modulator of AM modulation.",
    "16. The tactile and proximity sensor according to claim 8, wherein the detection circuit includes a filter to allow a signal component including a modulation frequency of detection light to pass through or a synchronous detection element.",
    "17. The tactile and proximity sensor according to claim 4, wherein the substrate is made of any of glass, acrylic, polycarbonate, polyimide, silicon, or gallium arsenide.",
    "18. The tactile and proximity sensor according to claim 1, wherein the elastic structure includes a plurality of transparent layer, a reflector, and a shadow mask.",
    "19. The tactile and proximity sensor according to claim 1, further comprising a plurality of the light receivers and a plurality of concave mirrors facing the plurality of light receivers.",
    "20. The tactile and proximity sensor according to claim 1, wherein the elastic structure includes a spring structure."
  ],
  "description_excerpt": "The present invention relates to a tactile and proximity sensor.\n\nIn recent years, various sensors are proposed which are mounted on robot hands or the like and capable of performing various types of sensing including tactile sensing (for example, Japanese Patent No. 5089774, Japanese Patent No. 5825604 and International Publication No. 2014/045685).\n\nJapanese Patent No. 5089774 discloses a composite sensor to be attached to a fingertip surface of a robot hand for performing gripping operation on an object or the like. The composite sensor of Japanese Patent No. 5089774 has a tactile sensor provided with a pressure-sensitive sheet and a proximity sensor constituted of a reflective photosensor. The composite sensor of Japanese Patent No. 5089774 is configured by combining two sensors such that a detection surface of the proximity sensor is defined by the pressure-sensitive sheet.\n\nJapanese Patent No. 5825604 discloses an optical tactile sensor capable of measuring six-axis force. International Publication No. 2014/045685 discloses a force sensor that detects a shearing force using a variable frame. In Japanese Patent No. 5825604 and International Publication No. 2014/045685, in an optical mechanism utilizing deformation of an elastic body, tactile sensing is performed to sense various contact forces by an object.\n\nIn the related art, there has been a problem that when proximity sensing is performed together with tactile sensing, a device configuration is large by mounting sensors separately and a sensing mechanism is complicated by requiring a complicated detection principle.",
  "cpc": [
    "G01D 5/26",
    "G01B 11/026",
    "G01B 11/16",
    "G01C 3/00",
    "G01D 5/30",
    "G01L 1/24"
  ],
  "ipc": [
    "G01B 11/16",
    "G01C 3/00",
    "G01D 5/26"
  ],
  "assignees": [
    "Murata Manufacturing Co Ltd"
  ],
  "inventors": [
    "Takatoshi Kato",
    "Hiroshi Watanabe",
    "Kohei SUGAHARA"
  ],
  "filing_date": "2021-06-15",
  "publication_date": "2024-04-09",
  "grant_date": "2024-04-09",
  "priority_date": "2019-02-15",
  "application_number": "US-202117347701-A",
  "family_id": "72045270",
  "cited_by_count": 2,
  "citations": [
    "JP2007071564A",
    "US20100108870A1",
    "US8749522B2",
    "US20110067504A1",
    "JP5089774B2",
    "US20130036829A1",
    "US20120330190A1",
    "JP2013007744A",
    "US9510786B2",
    "JP2015500057A",
    "US20140309550A1",
    "US20150177082A1",
    "WO2014045685A1",
    "JP2016512772A",
    "US20160228071A1",
    "US9962127B2",
    "CN108323194A",
    "US20170161540A1",
    "CN109155628A",
    "US20190285735A1",
    "US20170363464A1"
  ]
}

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