Article handling device

{
  "publication_number": "US4058223A",
  "country": "US",
  "kind": "A",
  "title": "Article handling device",
  "abstract": "A pin is integral with a diaphragm and extends from one side of the diaphragm. The other side of the diaphragm is subjected to a pressure or vacuum to create a pressure differential across the diaphragm to move the pin into or out of engagement with an article within a controlled environment. The diaphragm isolates a fluid, which produces the pressure differential across the diaphragm, from the controlled environment. In one embodiment, the pin is formed at the center of the diaphragm and moves only in a straight line. In another embodiment, the pin is formed eccentric to the center of the diaphragm so as to have a combination movement of angular and straight. The pin can be employed to stop an article such as a semiconductor wafer, for example, or to raise or to lower the wafer without the actuating fluid contaminating the controlled environment in which the semiconductor wafer is disposed.",
  "claims": [
    "1. A device for engaging an article movable in a controlled environment including: an element selectively movable relative to the article to be engaged to cause said element to selectively engage the article movable in the controlled environment without blocking the controlled environment, the article being movable in a plane transverse to the location of said element and adapted to be positioned during its movement in the plane to a position in which said element can engage the article and then be removed from the position in which said element can engage the article; means to support said element, said support means isolating said element within the controlled environment, said element being free standing within the controlled environment; means to move said support means to move said element from a position in which said element cannot engage the article to interfere with movement of the article in the controlled environment in the plane transverse to the location of said element to a position in which said element engages the article to control its position within the controlled environment; said support means is a diaphragm having one side always communicating with the controlled environment; and said moving means includes means to produce a fluid pressure differential across said diaphragm by acting on the side of said diaphragm remote from the controlled environment to cause movement of said diaphragm and said element.",
    "2. The device according to claim 1 in which said element is a pin integral with said diaphragm.",
    "3. The device according to claim 2 in which said pin is disposed at the center of said diaphragm and extends from the one side of said diaphragm communicating with the controlled environment.",
    "4. The device according to claim 3 including means to limit the movement of said diaphragm when said producing means produces a pressure differential thereacross.",
    "5. The device according to claim 4 in which said producing means includes: means to produce a vacuum on the side of said diaphragm remote from the controlled environment to cause movement of said pin away from the controlled environment; and means to produce a pressure, greater than the pressure within the controlled environment, on the side of said diaphragm remote from the controlled environment to cause movement of said pin toward the controlled environment.",
    "6. The device according to claim 1 in which said element is a pin movable with said diaphragm.",
    "7. The device according to claim 6 in which said pin is disposed in alignment with the center of said diaphragm.",
    "8. The device according to claim 7 including means to limit the movement of said diaphragm when said producing means produces a pressure differential thereacross.",
    "9. The device according to claim 8 in which said producing means includes: means to produce a vacuum on the side of said diaphragm remote from the controlled environment to cause movement of said pin away from the controlled environment; and means to produce a pressure, greater than the pressure within the controlled environment, on the side of said diaphragm remote from the controlled environment to cause movement of said pin toward the controlled environment.",
    "10. A device for engaging an article in a controlled environment including: an element selectively movable relative to the article to be engaged; means to support said element, said support means isolating said element within the controlled environment; means to move said support means to move said element from a first position to a second position, said element engaging the article when said element is in at least one of the first and second positions; said support means is a diaphragm; said element is a pin movable with said diaphragm; and said pin is eccentrically disposed relative to the center of said diaphragm.",
    "11. A device for engaging an article movable in a controlled environment including: an element selectively movable relative to the article to be engaged to cause said element to selectively engage the article movable in the controlled environment without blocking the controlled environment, the article being movable in a plane transverse to the location of said element and adapted to be positioned during its movement in the plane to a position in which said element can engage the article and then be removed from the position in which said element can engage the article; means to support said element, said support means isolating said element within the controlled environment, said element being free standing within the controlled environment; means to move said support means to move said element from a position in which said element cannot engage the article to interfere with movement of the article in the controlled environment in the plane transverse to the location of said element to a position in which said element engages the article to control its position within the controlled environment; said support means is a diaphragm having one side always communicating with the controlled environment; a plurality of said elements for selectively engaging the article movable in the controlled environment, said elements being disposed relative to each other so that all of said elements can engage the article at the same time; each of said elements having a separate one of said support means, each of said support means having a separate one of said moving means; and each of said moving means being selectively effective separately to control the direction of motion of the article within the controlled environment.",
    "12. The device according to claim 10 in which said moving means includes means to produce a pressure differential across said diaphragm to cause movement of said diaphragm.",
    "13. The device according to claim 12 including means to limit the movement of said diaphragm when said producing means produces a pressure differential thereacross.",
    "14. The device according to claim 13 in which said producing means includes: means to produce a vacuum on the side of said diaphragm remote from the controlled environment to cause movement of said pin away from the controlled environment and means to produce a pressure, greater than the pressure within the controlled environment, on the side of said diaphragm remote from the controlled environment to cause movement of said pin toward the controlled environment.",
    "15. The device according to claim 10 in which said pin is integral with said diaphragm.",
    "16. The device according to claim 15 including: said moving means including means to produce a pressure differential across said diaphragm to cause movement of said diaphragm and said element; and means to limit the movement of said diaphragm when said producing means produces a pressure differential thereacross.",
    "17. The device according to claim 16 in which said producing means includes: means to produce a vacuum on the side of said diaphragm remote from the controlled environment to cause movement of said pin away from the controlled environment; and means to produce a pressure, greater than the pressure within the controlled environment, on the side of said diaphragm remote from the controlled environment to cause movement of said pin toward the controlled environment."
  ],
  "description_excerpt": "In processing semiconductor wafers, it is necessary that the wafers be maintained in a controlled environment in which they are not contaminated. Thus, the wafers, which can be moved along an air slide or track between various positions, for example, must be stopped at various positions during their movement and possibly raised or lowered when held in a certain position at which a processing step occurs. Furthermore, when disposed at a particular processing location, it is necessary that the wafer be maintained at a desired fixed position during this processing. The pressurized air in the air slide or track would keep the wafer moving if it is not positively held in the desired position. It also is necessary that the pressure with which the wafer is retained at a desired position by the retaining means be controlled so that there is no damage to the wafer when it is stopped or held at the desired position. It also is necessary that the wafer be held without any damage to its edges and that the processing surface not be contacted.\n\nThe article handling device of the present invention satisfactorily meets the foregoing requirements through providing an element movable relative to the article to be handled. The element is preferably a pin, which is formed of a suitable resilient material such as silicone rubber, for example, so that it will not damage the wafer when it engages therewith. Additionally, the element is supported so that the actuating fluid for moving the element relative to the article is isolated from the clean or controlled environment in which the article is disposed.",
  "cpc": [
    "B28D 5/00",
    "B28D 5/0058",
    "B65G 51/03",
    "Y10T 408/54"
  ],
  "ipc": [
    "B25J 15/06",
    "B28D 5/00",
    "B65G 51/03",
    "H01L 21/677"
  ],
  "assignees": [
    "IBM"
  ],
  "inventors": [
    "CRUSE BERND"
  ],
  "filing_date": "1975-06-19",
  "publication_date": "1977-11-15",
  "grant_date": "1977-11-15",
  "priority_date": "1975-06-19",
  "application_number": "US-58853175-A",
  "family_id": "24354227",
  "citations": [
    "BE515632A",
    "DE2406341A1",
    "US2604574A",
    "US2817727A",
    "US2900915A",
    "US2937788A",
    "US3121552A",
    "US3613518A",
    "US3898403A"
  ]
}