Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device

{
  "publication_number": "US10391769B2",
  "country": "US",
  "kind": "B2",
  "title": "Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device",
  "abstract": "Provided is a liquid ejecting head that ejects a liquid in a pressure chamber by a piezoelectric device, the piezoelectric device including a vibration plate, a piezoelectric layer containing lead, a first electrode provided between the vibration plate and the piezoelectric layer, and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer. The piezoelectric layer is preferentially oriented in a (100) plane, a lattice constant c defined by a crystal plane of the piezoelectric layer parallel to a film surface of the piezoelectric layer and a lattice constant a defined by a crystal plane perpendicular to the film surface satisfy 0.9945≤c/a≤1.012, and the thickness of the piezoelectric device is twice or more the thickness t (t<5 μm) of the piezoelectric layer.",
  "claims": [
    "1. A liquid ejecting head that ejects a liquid in a pressure chamber by a piezoelectric device, the piezoelectric device including a vibration plate, a piezoelectric layer containing lead, a first electrode provided between the vibration plate and the piezoelectric layer, and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer, wherein the piezoelectric layer is preferentially oriented in a (100) plane, a lattice constant c defined by a crystal plane of the piezoelectric layer parallel to a film surface of the piezoelectric layer and a lattice constant a defined by a crystal plane perpendicular to the film surface satisfy 0.9945≤c/a≤1.012, and a thickness of the piezoelectric device is twice or more a thickness t (t<5 μm) of the piezoelectric layer.",
    "2. The liquid ejecting head according to claim 1, wherein the lattice constant c and the lattice constant a satisfy c/a>0.996.",
    "3. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 2.",
    "4. The liquid ejecting head according to claim 1, wherein for the piezoelectric device formed outside the pressure chamber, the lattice constant c and the lattice constant a satisfy c/a≤0.996.",
    "5. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 4.",
    "6. The liquid ejecting head according to claim 1, wherein for a portion of the piezoelectric layer located on a side opposite to a side of the pressure chamber as viewed from a neutral plane of the piezoelectric device, the lattice constant c and the lattice constant a satisfy 0.9945≤c/a≤1.012.",
    "7. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 6.",
    "8. The liquid ejecting head according to claim 1 wherein the thickness of the piezoelectric device is 6t or less.",
    "9. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 8.",
    "10. The liquid ejecting head according to claim 1 wherein the vibration plate contains ZrO 2.",
    "11. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 10.",
    "12. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.",
    "13. A liquid ejecting head that ejects a liquid in a pressure chamber by a piezoelectric device, the piezoelectric device including a vibration plate, a piezoelectric layer containing lead, a first electrode provided between the vibration plate and the piezoelectric layer, and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer, wherein a spacing C between lattice planes of a crystal of the piezoelectric layer parallel to a film surface of the piezoelectric layer and a spacing A between lattice planes perpendicular to the film surface satisfy 0.9945≤C/A≤1.012, and a thickness of the piezoelectric device is twice or more a thickness t (t<5 μm) of the piezoelectric layer.",
    "14. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 13.",
    "15. A piezoelectric device comprising: a vibration plate; a piezoelectric layer containing lead; a first electrode provided between the vibration plate and the piezoelectric layer; and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer, wherein the piezoelectric layer is preferentially oriented in a (100) plane, a lattice constant c defined by a crystal plane of the piezoelectric layer parallel to a film surface of the piezoelectric layer and a lattice constant a defined by a crystal plane perpendicular to the film surface satisfy 0.9945≤c/a≤1.012, and a thickness of the piezoelectric device is twice or more a thickness t (t<5 μm) of the piezoelectric layer."
  ],
  "description_excerpt": "The entire disclosure of Japanese Patent Application No. 2017-124368, filed Jun. 26, 2017 is expressly incorporated by reference herein.\n\nThe present invention relates to a liquid ejecting head, a liquid ejecting apparatus, and a piezoelectric device.\n\nTo date, a liquid ejecting head that ejects a liquid such as ink that has filled a pressure chamber has been proposed. For example, JP-A-2008-258575 and JP-A-2002-299714 disclose a liquid ejecting head that ejects a liquid by vibrating a vibration plate constituting a wall surface of a pressure chamber by using a piezoelectric element.\n\nIn order to improve the performance of a liquid ejecting head, it is very important to improve the performance of a piezoelectric device including a piezoelectric element and a vibration plate.\n\nAn advantage of some aspects of the invention is that a piezoelectric device with improved performance is provided.\n\nFirst Aspect\n\nA liquid ejecting head according to a preferable aspect (first aspect) of the invention is a liquid ejecting head that ejects a liquid in a pressure chamber by a piezoelectric device, the piezoelectric device including a vibration plate, a piezoelectric layer containing lead, a first electrode provided between the vibration plate and the piezoelectric layer, and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer.",
  "cpc": [
    "B41J 2/14233",
    "B41J 2202/10",
    "H01L 41/047",
    "H01L 41/0973",
    "H01L 41/1876",
    "H10N 30/2047",
    "H10N 30/708",
    "H10N 30/8554",
    "H10N 30/87"
  ],
  "ipc": [
    "B41J 2/14",
    "H10N 30/20",
    "H10N 30/87"
  ],
  "assignees": [
    "Seiko Epson Corp"
  ],
  "inventors": [
    "Ichiro ASAOKA",
    "Hiromu Miyazawa",
    "Masayuki Omoto",
    "Toshiki Hara",
    "Toshihiro Shimizu",
    "Akira Kuriki"
  ],
  "filing_date": "2018-06-22",
  "publication_date": "2019-08-27",
  "grant_date": "2019-08-27",
  "priority_date": "2017-06-26",
  "application_number": "US-201816015447-A",
  "family_id": "64691850",
  "cited_by_count": 1,
  "citations": [
    "JP2002299714A",
    "US20080224571A1",
    "JP2008258575A",
    "US20110148992A1",
    "US7896480B2",
    "US7918543B2",
    "US9022530B2"
  ]
}