Piezoelectric drive device, robot, and printer

{
  "publication_number": "US11349062B2",
  "country": "US",
  "kind": "B2",
  "title": "Piezoelectric drive device, robot, and printer",
  "abstract": "A piezoelectric drive device includes a vibrating part, and a control unit that controls vibration of the vibrating part, wherein the vibrating part includes a piezoelectric material having a first surface and a second surface in a front-back relation, a drive electrode having a first electrode arranged at the first surface and a second electrode arranged at the second surface, and vibrating the piezoelectric material when a drive signal from the control unit is input to the second electrode, and a detection electrode having a third electrode arranged at the first surface and a fourth electrode arranged at the second surface, and outputting a detection signal according to the vibration of the piezoelectric material to the control unit via the fourth electrode, and the first electrode and the third electrode are separated on the first surface, and the second electrode and the fourth electrode are separated on the second surface.",
  "claims": [
    "1. A piezoelectric drive device comprising: a vibrating part that drives a driven member by vibration; and a control unit that controls the vibration of the vibrating part, wherein the vibrating part includes a piezoelectric material having a first surface and a second surface in a front-back relation, a drive electrode having a first electrode arranged at the first surface and a second electrode arranged at the second surface, and vibrating the piezoelectric material when a drive signal from the control unit is input to the second electrode, and a detection electrode having a third electrode arranged at the first surface and a fourth electrode arranged at the second surface, and outputting a detection signal according to the vibration of the piezoelectric material to the control unit via the fourth electrode, and the first electrode and the third electrode are separated on the first surface, and the second electrode and the fourth electrode are separated on the second surface, the piezoelectric drive device further comprising: a first detection wire electrically coupling the third electrode and the control unit; and a second detection wire electrically coupling the fourth electrode and the control unit, wherein when a part placed in the vibrating part of the first detection wire is a first vibrating part wire and a part placed in the vibrating part of the second detection wire is a second vibrating part wire, the first vibrating part wire and the second vibrating part wire are placed apart.",
    "2. The piezoelectric drive device according to claim 1, wherein the control unit has a differential amplifier coupled to the first detection wire and the second detection wire.",
    "3. The piezoelectric drive device according to claim 1, further comprising a first reference potential wire and a second reference potential wire coupled to a reference potential, wherein the first vibrating part wire and the second vibrating part wire are placed between the first reference potential wire and the second reference potential wire.",
    "4. The piezoelectric drive device according to claim 3, further comprising a third reference potential wire coupled to the reference potential, wherein the first reference potential wire, second reference potential wire, first vibrating part wire, and second vibrating part wire and the third reference potential wire overlap in plan view of the first surface.",
    "5. The piezoelectric drive device according to claim 1, wherein a length of the first vibrating part wire and a length of the second vibrating part wire are substantially equal.",
    "6. The piezoelectric drive device according to claim 1, wherein the first vibrating part wire and the second vibrating part wire are formed using a same constituent material and arranged at a same surface.",
    "7. The piezoelectric drive device according to claim 1, wherein the vibrating part includes a substrate and the piezoelectric material arranged at one surface of the substrate, and a parasitic capacitance between the first vibrating part wire and third electrode and the substrate and a parasitic capacitance between the second vibrating part wire and fourth electrode and the substrate are the same.",
    "8. A robot comprising a piezoelectric drive device including a vibrating part and a control unit that controls vibration of the vibrating part, and vibrating the vibrating part and driving a driven member in contact with the vibrating part, wherein the vibrating part includes a piezoelectric material having a first surface and a second surface in a front-back relation, a drive electrode having a first electrode arranged at the first surface and a second electrode arranged at the second surface, and vibrating the piezoelectric material when a drive signal from the control unit is input to the second electrode, and a detection electrode having a third electrode arranged at the first surface and a fourth electrode arranged at the second surface, and outputting a detection signal according to the vibration of the piezoelectric material to the control unit via the fourth electrode, and the first electrode and the third electrode are separated on the first surface, and the second electrode and the fourth electrode are separated on the second surface, the piezoelectric drive device further comprising: a first detection wire electrically coupling the third electrode and the control unit; and a second detection wire electrically coupling the fourth electrode and the control unit, wherein when a part placed in the vibrating part of the first detection wire is a first vibrating part wire and a part placed in the vibrating part of the second detection wire is a second vibrating part wire, the first vibrating part wire and the second vibrating part wire are placed apart.",
    "9. A printer comprising a piezoelectric drive device including a vibrating part and a control unit that controls vibration of the vibrating part, and vibrating the vibrating part and driving a driven member in contact with the vibrating part, wherein the vibrating part includes a piezoelectric material having a first surface and a second surface in a front-back relation, a drive electrode having a first electrode arranged at the first surface and a second electrode arranged at the second surface, and vibrating the piezoelectric material when a drive signal from the control unit is input to the second electrode, and a detection electrode having a third electrode arranged at the first surface and a fourth electrode arranged at the second surface, and outputting a detection signal according to the vibration of the piezoelectric material to the control unit via the fourth electrode, and the first electrode and the third electrode are separated on the first surface, and the second electrode and the fourth electrode are separated on the second surface, the piezoelectric drive device further comprising: a first detection wire electrically coupling the third electrode and the control unit; and a second detection wire electrically coupling the fourth electrode and the control unit, wherein when a part placed in the vibrating part of the first detection wire is a first vibrating part wire and a part placed in the vibrating part of the second detection wire is a second vibrating part wire, the first vibrating part wire and the second vibrating part wire are placed apart."
  ],
  "description_excerpt": "The present application is based on, and claims priority from, JP Application Serial Number 2018-163087, filed Aug. 31, 2018, the disclosure of which is hereby incorporated by reference herein in its entirety.\n\nThe present disclosure relates to a piezoelectric drive device, robot, and printer.\n\nA vibrator disclosed in JP-A-2009-284375 is a vibrator that may detect adhesion of minute materials, viscosity changes of liquids, or the like by oscillating the vibrator in a principal vibration mode having constant frequency and amplitude. The vibrator includes a substrate, a foundation electrode formed on a thin portion of the substrate, a piezoelectric layer formed on the foundation electrode, and a drive electrode and a detection electrode formed on the piezoelectric layer. In the vibrator, as seen from a thickness direction of the piezoelectric layer, the foundation electrode is placed to overlap with both the drive electrode and the detection electrode. That is, the foundation electrode is a counter electrode in common with both the drive electrode and the detection electrode.\n\nIn the vibrator disclosed in JP-A-2009-284375, as described above, the foundation electrode opposed to the drive electrode and the foundation electrode opposed to the detection electrode are common.",
  "cpc": [
    "H02N 2/004",
    "B25J 9/12",
    "H01L 41/042",
    "H01L 41/0471",
    "H01L 41/09",
    "H02N 2/001",
    "H02N 2/0015",
    "H02N 2/0085",
    "H02N 2/04",
    "H02N 2/103",
    "H02N 2/12",
    "H02N 2/14",
    "H02N 2/142",
    "H02P 25/032",
    "H10N 30/20",
    "H10N 30/802",
    "H10N 30/871"
  ],
  "ipc": [
    "B25J 9/12",
    "H02N 2/00",
    "H02N 2/04",
    "H02N 2/10",
    "H02N 2/14",
    "H02P 25/032",
    "H10N 30/06",
    "H10N 30/20",
    "H10N 30/80",
    "H10N 30/853",
    "H10N 30/857",
    "H10N 30/87"
  ],
  "assignees": [
    "Seiko Epson Corp"
  ],
  "inventors": [
    "Kiichi Kajino",
    "Tomoaki Takahashi",
    "Akio Konishi"
  ],
  "filing_date": "2019-08-30",
  "publication_date": "2022-05-31",
  "grant_date": "2022-05-31",
  "priority_date": "2018-08-31",
  "application_number": "US-201916556273-A",
  "family_id": "69639470",
  "cited_by_count": 0,
  "citations": [
    "US20070188048A1",
    "US20070188050A1",
    "JP2009284375A",
    "US20170001306A1"
  ]
}