Patent · US12436034B2 · B2 · US

Ferroelectric sensor

(11) Publication number

US12436034B2

(21) Application number

17/611,016

(22) Filing date

2020-05-15

(30) Priority date

2019-05-15

(43) Publication date

2025-10-07

(45) Date of grant

2025-10-07

(51) IPC

B25J 19/02; G01J 5/34; G01L 1/16; G01R 27/26; H10N 30/00; H10N 30/03; H10N 30/50; H10N 30/85; H10N 30/857; H10N 30/88

(52) CPC

G01J Measurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light; colorimetry; radiation pyrometry: 5/34, 5/00, 5/0025, 5/046, 5/12
B25J Manipulators; chambers provided with manipulation devices: 19/028
E05D Hinges or suspension devices for doors, windows or wings: 15/02
E05F Devices for moving wings into open or closed position; checks for wings; wing fittings not otherwise provided for, concerned with the functioning of the wing: 15/73
E05Y Indexing scheme associated with subclasses E05D and E05F, relating to construction elements, electric control, power supply, power signal or transmission, user interfaces, mounting or coupling, details, accessories, auxiliary operations not otherwise provided for, application thereof: 2400/852, 2400/858, 2900/104
G01D Measuring not specially adapted for a specific variable; arrangements for measuring two or more variables not covered in a single other subclass; tariff metering apparatus; measuring or testing not otherwise provided for: 5/12, 5/24
G01L Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure: 1/16
G01R Measuring electric variables; measuring magnetic variables: 27/2605
H03K Pulse technique: 17/955, 17/962, 17/964
H10N Electric solid-state devices not otherwise provided for: 15/10, 30/03, 30/101, 30/2042, 30/302, 30/50, 30/506, 30/852, 30/857, 30/87, 30/878, 30/88

(73) Assignee

TDK Electronics AG

(72) Inventors

Sandro Kappert; Stefan Sax; Johann Pichler

(54) Title

Ferroelectric sensor

(57) Abstract

A sensor (1) which consists of a first electrode (3 a), a ferroelectric layer (2) and a second electrode (3 b) is described. The second electrode (3 b) is connected to ground and the ferroelectric layer (2) is arranged between the first and second electrodes (3 a, 3 b).

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Claims (33)

A sensor comprising: a first electrode; a ferroelectric layer; a second electrode, wherein the second electrode is connected to ground and the ferroelectric layer is arranged between the first and second electrodes; and a carrier material and at least one mechanical amplifier element, wherein the at least one mechanical amplifier element is arranged on at least one of the first electrode, the second electrode or the carrier material, and wherein the at least one mechanical amplifier element is an extension of the first electrode and/or the carrier material in an axial direction.
The sensor as claimed in claim 1, wherein the ferroelectric layer comprises a polymer, a ceramic or a polymer-ceramic matrix.
The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) a transparent and a thermally as well as electrically conductive material.
The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) one or more metals, the one or more metals comprising Al, Cr, Ni, Ag, Cu, Fe or a mixture thereof or an alloy of these elements.
The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) a conductive layer which is transparent in an UV-Vis range and/or in an IR range.
The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) an indium titan oxide (ITO), a poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), silver, nanowires, graphite, carbon nanotubes or graphene.
The sensor as claimed in claim 1, further comprising additional first electrodes, additional second electrodes and additional ferroelectric layers, and wherein the ferroelectric layers are arranged between the first and second electrodes.
The sensor as claimed in claim 7, wherein all the first electrodes are connected in parallel with one another and all the second electrodes are connected in parallel with one another, and wherein the sensor is configured to provide an electrical signal between the first and second electrodes.
The sensor as claimed in claim 7, wherein individual ferroelectric layers are contacted separately, and wherein the sensor is configured to provide an electrical signal for each of the ferroelectric layers respectively between one of the first electrodes and one of the second electrodes.
The sensor as claimed in claim 1, wherein the first electrode is arranged inside the sensor, wherein the ferroelectric layer encloses the first electrode, and wherein the second electrode encloses the ferroelectric layer.
The sensor as claimed in claim 1, wherein the sensor comprises an insulation layer on which the first electrode or the second electrode is arranged, and wherein the sensor is coiled such that the insulation layer lies on an inner side.
The sensor as claimed in claim 1, wherein the first electrode or the second electrode is arranged on the carrier material.
The sensor as claimed in claim 1, wherein the sensor comprises an insulation layer on which the first electrode or the second electrode is arranged, and wherein the sensor is coiled such that the insulation layer is arranged on the carrier material.
The sensor as claimed in claim 1, wherein the carrier material is arranged inside the sensor, and wherein the first electrode encloses the carrier material, the ferroelectric layer encloses the first electrode and the second electrode encloses the ferroelectric layer.
The sensor as claimed in claim 14, wherein additional first electrodes, additional second electrodes and additional ferroelectric layers enclose the second electrode, wherein the first and second electrodes are arranged radially alternating, and wherein each of the ferroelectric layers is respectively arranged between one of the first electrodes and one of the second electrodes.
The sensor as claimed in claim 1, wherein the carrier material is a glass fiber.
The sensor as claimed in claim 16, further comprising an optically reactive sensor layer arranged on a part of a lateral surface of the glass fiber.
The sensor as claimed in claim 1, wherein the sensor is a cylindrical sensor or wherein the sensor has a shape of a plate.
The sensor as claimed in claim 1, wherein the at least one mechanical amplifier element is formed from the first electrode and/or the second electrode.
The sensor as claimed in claim 1, wherein the at least one mechanical amplifier element is formed from the carrier material.
The sensor as claimed in claim 1, wherein the at least one mechanical amplifier element is formed from the first electrode and the carrier material.
The sensor as claimed in claim 1, wherein the ferroelectric layer and/or the first electrode and/or the second electrode is/are thinner than 50 μm.
The sensor as claimed in claim 1, wherein the ferroelectric layer comprises a piezoelectric and/or pyroelectric material.
An arrangement comprising: at least one set of evaluation electronics; and at least one sensor as claimed in claim 1, wherein the evaluation electronics are configured to: measure an electrical signal generated by the sensor, and identify a piezoelectric effect, a pyroelectric effect and a capacitive effect by changes of the electrical signal.
The arrangement as claimed in claim 24, wherein the evaluation electronics are configured to identify, with aid of the measured changes of the electrical signal, whether an object is approaching the sensor or whether an object is touching the sensor.
The arrangement as claimed in claim 24, wherein the measured changes of the electrical signal comprise a change in a signal/time profile and/or an amplitude and/or a timescale and/or temporal dynamics and/or a polarity.
The arrangement as claimed in claim 24, wherein the electrical signal comprises a voltage and/or a charge and/or a capacitance and/or a polarity.
The arrangement as claimed in claim 24, further comprising: a plurality of sensors as claimed in claim 1, wherein the sensors are arranged in a matrix.
A robot comprising: the sensor as claimed in claim 1.
A collaborative system comprising: the sensor as claimed in claim 1.
An automatic door comprising: the sensor as claimed in claim 1.
A method for producing the sensor as claimed in claim 1, the method comprising: applying the ferroelectric layer on the first electrode by a thin-film method, by a combination of a sol-gel method with spin coating, or by screen printing.
The sensor as claimed in claim 1, wherein the carrier material is a textile fiber.

Description

This patent application is a national phase filing under section 371 of PCT/EP2020/063664, filed May 15, 2020, which claims the priority of German patent application 102019112771.8, filed May 15, 2019, each of which is incorporated herein by reference in its entirety.

The invention relates to a ferroelectric sensor.

Because of progressive digitization, which is currently being advanced under the terms Industry 4.0 or Internet of Things, interactions between machines and of machines with humans are becoming increasingly commonplace. One of the many challenges is to increase the safety of humans as well as machines during these interactions, by avoiding accidents.

In this context, in order to identify a hazard and avoid a possible coalition, various sensor types, which are often based on different physical effects, are installed in increasingly intelligent machines. On the one hand, optical sensors or camera modules may be used for early identification of a possible hazard by virtue of the extent of their detection range. Ultrasound sensors, on the other hand, are suitable for example for measurements at a close distance and may thus identify danger nearby. In immediate proximity, that is to say when contact takes place between a machine and the environment, a capacitive or resistive sensor, such as a contact protection strip, may for example be used to detect touching.

Usually, a plurality of different sensor types is installed in semiautonomous or fully autonomous machines in order to prevent a collision. Since the sensors cover different regions, a more complete image of the environment can thus be created.

Citations (116)

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Record as JSON

{
  "publication_number": "US12436034B2",
  "country": "US",
  "kind": "B2",
  "title": "Ferroelectric sensor",
  "abstract": "A sensor (1) which consists of a first electrode (3 a), a ferroelectric layer (2) and a second electrode (3 b) is described. The second electrode (3 b) is connected to ground and the ferroelectric layer (2) is arranged between the first and second electrodes (3 a, 3 b).",
  "claims": [
    "1. A sensor comprising: a first electrode; a ferroelectric layer; a second electrode, wherein the second electrode is connected to ground and the ferroelectric layer is arranged between the first and second electrodes; and a carrier material and at least one mechanical amplifier element, wherein the at least one mechanical amplifier element is arranged on at least one of the first electrode, the second electrode or the carrier material, and wherein the at least one mechanical amplifier element is an extension of the first electrode and/or the carrier material in an axial direction.",
    "2. The sensor as claimed in claim 1, wherein the ferroelectric layer comprises a polymer, a ceramic or a polymer-ceramic matrix.",
    "3. The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) a transparent and a thermally as well as electrically conductive material.",
    "4. The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) one or more metals, the one or more metals comprising Al, Cr, Ni, Ag, Cu, Fe or a mixture thereof or an alloy of these elements.",
    "5. The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) a conductive layer which is transparent in an UV-Vis range and/or in an IR range.",
    "6. The sensor as claimed in claim 1, wherein the first electrode and/or the second electrode comprise(s) an indium titan oxide (ITO), a poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), silver, nanowires, graphite, carbon nanotubes or graphene.",
    "7. The sensor as claimed in claim 1, further comprising additional first electrodes, additional second electrodes and additional ferroelectric layers, and wherein the ferroelectric layers are arranged between the first and second electrodes.",
    "8. The sensor as claimed in claim 7, wherein all the first electrodes are connected in parallel with one another and all the second electrodes are connected in parallel with one another, and wherein the sensor is configured to provide an electrical signal between the first and second electrodes.",
    "9. The sensor as claimed in claim 7, wherein individual ferroelectric layers are contacted separately, and wherein the sensor is configured to provide an electrical signal for each of the ferroelectric layers respectively between one of the first electrodes and one of the second electrodes.",
    "10. The sensor as claimed in claim 1, wherein the first electrode is arranged inside the sensor, wherein the ferroelectric layer encloses the first electrode, and wherein the second electrode encloses the ferroelectric layer.",
    "11. The sensor as claimed in claim 1, wherein the sensor comprises an insulation layer on which the first electrode or the second electrode is arranged, and wherein the sensor is coiled such that the insulation layer lies on an inner side.",
    "12. The sensor as claimed in claim 1, wherein the first electrode or the second electrode is arranged on the carrier material.",
    "13. The sensor as claimed in claim 1, wherein the sensor comprises an insulation layer on which the first electrode or the second electrode is arranged, and wherein the sensor is coiled such that the insulation layer is arranged on the carrier material.",
    "14. The sensor as claimed in claim 1, wherein the carrier material is arranged inside the sensor, and wherein the first electrode encloses the carrier material, the ferroelectric layer encloses the first electrode and the second electrode encloses the ferroelectric layer.",
    "15. The sensor as claimed in claim 14, wherein additional first electrodes, additional second electrodes and additional ferroelectric layers enclose the second electrode, wherein the first and second electrodes are arranged radially alternating, and wherein each of the ferroelectric layers is respectively arranged between one of the first electrodes and one of the second electrodes.",
    "16. The sensor as claimed in claim 1, wherein the carrier material is a glass fiber.",
    "17. The sensor as claimed in claim 16, further comprising an optically reactive sensor layer arranged on a part of a lateral surface of the glass fiber.",
    "18. The sensor as claimed in claim 1, wherein the sensor is a cylindrical sensor or wherein the sensor has a shape of a plate.",
    "19. The sensor as claimed in claim 1, wherein the at least one mechanical amplifier element is formed from the first electrode and/or the second electrode.",
    "20. The sensor as claimed in claim 1, wherein the at least one mechanical amplifier element is formed from the carrier material.",
    "21. The sensor as claimed in claim 1, wherein the at least one mechanical amplifier element is formed from the first electrode and the carrier material.",
    "22. The sensor as claimed in claim 1, wherein the ferroelectric layer and/or the first electrode and/or the second electrode is/are thinner than 50 μm.",
    "23. The sensor as claimed in claim 1, wherein the ferroelectric layer comprises a piezoelectric and/or pyroelectric material.",
    "24. An arrangement comprising: at least one set of evaluation electronics; and at least one sensor as claimed in claim 1, wherein the evaluation electronics are configured to: measure an electrical signal generated by the sensor, and identify a piezoelectric effect, a pyroelectric effect and a capacitive effect by changes of the electrical signal.",
    "25. The arrangement as claimed in claim 24, wherein the evaluation electronics are configured to identify, with aid of the measured changes of the electrical signal, whether an object is approaching the sensor or whether an object is touching the sensor.",
    "26. The arrangement as claimed in claim 24, wherein the measured changes of the electrical signal comprise a change in a signal/time profile and/or an amplitude and/or a timescale and/or temporal dynamics and/or a polarity.",
    "27. The arrangement as claimed in claim 24, wherein the electrical signal comprises a voltage and/or a charge and/or a capacitance and/or a polarity.",
    "28. The arrangement as claimed in claim 24, further comprising: a plurality of sensors as claimed in claim 1, wherein the sensors are arranged in a matrix.",
    "29. A robot comprising: the sensor as claimed in claim 1.",
    "30. A collaborative system comprising: the sensor as claimed in claim 1.",
    "31. An automatic door comprising: the sensor as claimed in claim 1.",
    "32. A method for producing the sensor as claimed in claim 1, the method comprising: applying the ferroelectric layer on the first electrode by a thin-film method, by a combination of a sol-gel method with spin coating, or by screen printing.",
    "33. The sensor as claimed in claim 1, wherein the carrier material is a textile fiber."
  ],
  "description_excerpt": "This patent application is a national phase filing under section 371 of PCT/EP2020/063664, filed May 15, 2020, which claims the priority of German patent application 102019112771.8, filed May 15, 2019, each of which is incorporated herein by reference in its entirety.\n\nThe invention relates to a ferroelectric sensor.\n\nBecause of progressive digitization, which is currently being advanced under the terms Industry 4.0 or Internet of Things, interactions between machines and of machines with humans are becoming increasingly commonplace. One of the many challenges is to increase the safety of humans as well as machines during these interactions, by avoiding accidents.\n\nIn this context, in order to identify a hazard and avoid a possible coalition, various sensor types, which are often based on different physical effects, are installed in increasingly intelligent machines. On the one hand, optical sensors or camera modules may be used for early identification of a possible hazard by virtue of the extent of their detection range. Ultrasound sensors, on the other hand, are suitable for example for measurements at a close distance and may thus identify danger nearby. In immediate proximity, that is to say when contact takes place between a machine and the environment, a capacitive or resistive sensor, such as a contact protection strip, may for example be used to detect touching.\n\nUsually, a plurality of different sensor types is installed in semiautonomous or fully autonomous machines in order to prevent a collision. Since the sensors cover different regions, a more complete image of the environment can thus be created.",
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  "assignees": [
    "TDK Electronics AG"
  ],
  "inventors": [
    "Sandro Kappert",
    "Stefan Sax",
    "Johann Pichler"
  ],
  "filing_date": "2020-05-15",
  "publication_date": "2025-10-07",
  "grant_date": "2025-10-07",
  "priority_date": "2019-05-15",
  "application_number": "US-202017611016-A",
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    "JPS61247930A",
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