Piezoelectric driving device, piezoelectric motor, robot, electronic-component conveying apparatus, printer, and projector

{
  "publication_number": "US11133453B2",
  "country": "US",
  "kind": "B2",
  "title": "Piezoelectric driving device, piezoelectric motor, robot, electronic-component conveying apparatus, printer, and projector",
  "abstract": "A piezoelectric driving device includes a substrate, a first insulating film disposed on the substrate, a piezoelectric element for driving disposed on the first insulating film and configured to vibrate the substrate, a piezoelectric element for detection configured to detect the vibration of the substrate, a wire for driving electrically connected to the piezoelectric element for driving, a wire for detection electrically connected to the piezoelectric element for detection, and a lower layer wire disposed between the first insulating film and the substrate and set to fixed potential. At least one of the wire for driving and the wire for detection overlaps at least a part of the lower layer wire.",
  "claims": [
    "1. A piezoelectric driving device comprising: a substrate; a first insulating film disposed above one surface of the substrate; a piezoelectric element for driving disposed above the first insulating film and configured to vibrate the substrate; a piezoelectric element for detection disposed above the first insulating film and configured to detect the vibration of the substrate; a wire for driving disposed above the first insulating film and electrically connected to the piezoelectric element for driving; a wire for detection disposed above the first insulating film and electrically connected to the piezoelectric element for detection; and a lower layer wire disposed between the first insulating film and the substrate and set to fixed potential, wherein at least one of the wire for driving and the wire for detection overlaps the lower layer wire in a plan view of the substrate.",
    "2. The piezoelectric driving device according to claim 1, wherein the wire for driving overlaps the lower layer wire in the plan view of the substrate.",
    "3. The piezoelectric driving device according to claim 2, wherein the lower layer wire includes a portion projecting to an outer side from a contour of the wire for driving in the plan view of the substrate.",
    "4. The piezoelectric driving device according to claim 2, wherein the wire for detection overlaps the lower layer wire in the plan view of the substrate.",
    "5. The piezoelectric driving device according to claim 1, wherein width of the wire for detection is smaller than width of the wire for driving.",
    "6. The piezoelectric driving device according to claim 1, further comprising a second insulating film disposed between the substrate and the lower layer wire.",
    "7. The piezoelectric driving device according to claim 1, wherein the substrate is a silicon substrate.",
    "8. The piezoelectric driving device according to claim 1, wherein the lower layer wire is connected to a ground.",
    "9. The piezoelectric driving device according to claim 1, wherein the substrate includes vibrating sections and supporting sections configured to support the vibrating sections, and the piezoelectric element for driving and the piezoelectric element for detection are respectively disposed in the vibrating sections.",
    "10. A piezoelectric motor comprising: the piezoelectric driving device according to claim 1; and a driven section that is in contact with the piezoelectric driving device.",
    "11. A piezoelectric motor comprising: the piezoelectric driving device according to claim 2; and a driven section that is in contact with the piezoelectric driving device.",
    "12. A piezoelectric motor comprising: the piezoelectric driving device according to claim 3; and a driven section that is in contact with the piezoelectric driving device.",
    "13. A robot comprising the piezoelectric driving device according to claim 1.",
    "14. A robot comprising the piezoelectric driving device according to claim 2.",
    "15. An electronic-component conveying apparatus comprising the piezoelectric driving device according to claim 1.",
    "16. An electronic-component conveying apparatus comprising the piezoelectric driving device according to claim 2.",
    "17. A printer comprising the piezoelectric driving device according to claim 1.",
    "18. A printer comprising the piezoelectric driving device according to claim 2.",
    "19. A projector comprising the piezoelectric driving device according to claim 1.",
    "20. A projector comprising the piezoelectric driving device according to claim 2."
  ],
  "description_excerpt": "The present invention relates to a piezoelectric driving device, a piezoelectric motor, a robot, an electronic-component conveying apparatus, a printer, and a projector.\n\nAs a piezoelectric driving device, there has been known a configuration of the piezoelectric driving device described in JP-A-2017-17916 (Patent Literature 1). The piezoelectric driving device described in Patent Literature 1 includes a silicon substrate including a vibrating section and a supporting section that supports a vibrating section. A piezoelectric element for driving is disposed in the vibrating section. A wire for driving electrically connected to the piezoelectric element for driving is disposed in the supporting section.\n\nIn order to detect a vibration state of the vibrating section, in some case, a piezoelectric element for detection is provided in the vibrating section separately from the piezoelectric element for driving and a wire for detection electrically connected to the piezoelectric element for detection is provided in the supporting section. In this case, it is likely that the wire for driving and the wire for detection are capacitively coupled via the supporting section (the silicon substrate) and a signal for driving applied to the wire for driving intrudes into the wire for detection as noise. Therefore, it is likely that a detection signal cannot be accurately acquired and the vibration state of the vibrating section cannot be accurately detected.",
  "cpc": [
    "G03B 21/142",
    "B25J 9/0009",
    "B25J 9/12",
    "B41J 13/03",
    "B41J 2/14201",
    "B41J 29/38",
    "B65G 23/00",
    "G03B 21/53",
    "G03B 33/12",
    "H01L 21/67706",
    "H01L 41/0475",
    "H01L 41/053",
    "H01L 41/0825",
    "H02N 2/004",
    "H02N 2/103",
    "H02N 2/12",
    "H02N 2/14",
    "H10N 30/101",
    "H10N 30/2023",
    "H10N 30/875",
    "H10N 30/88",
    "H10P 72/3202"
  ],
  "ipc": [
    "B25J 9/00",
    "B41J 13/03",
    "B41J 2/14",
    "B41J 29/38",
    "B65G 23/00",
    "G03B 21/14",
    "G03B 21/53",
    "G03B 33/12",
    "H01L 21/677",
    "H02N 2/10",
    "H10N 30/00",
    "H10N 30/80",
    "H10N 30/87",
    "H10N 30/88"
  ],
  "assignees": [
    "Seiko Epson Corp"
  ],
  "inventors": [
    "Akio Konishi",
    "Kiichi Kajino"
  ],
  "filing_date": "2018-09-21",
  "publication_date": "2021-09-28",
  "grant_date": "2021-09-28",
  "priority_date": "2017-09-22",
  "application_number": "US-201816137611-A",
  "family_id": "65807881",
  "cited_by_count": 0,
  "citations": [
    "US20070188048A1",
    "US20160049574A1",
    "US20170001306A1",
    "JP2017017916A"
  ]
}