Optical device, lighting apparatus, measuring apparatus, part-inspecting apparatus, robot, electronic device, and movable object

{
  "publication_number": "US11581698B2",
  "country": "US",
  "kind": "B2",
  "title": "Optical device, lighting apparatus, measuring apparatus, part-inspecting apparatus, robot, electronic device, and movable object",
  "abstract": "An optical device includes: a substrate having a first surface, and a second surface opposite of the first surface; a plurality of surface emitting laser elements provided on the first surface of the substrate and configured to emit light in a direction intersecting the first surface; a plurality of optical elements disposed on the second surface so as to respectively correspond to the plurality of surface emitting laser elements; and an anti-reflection structure between the substrate and the plurality of optical elements.",
  "claims": [
    "1. An optical device comprising: a substrate having a first surface and a second surface opposite of the first surface; a plurality of surface emitting laser elements provided on the first surface of the substrate and configured to emit light in a direction intersecting the first surface; a plurality of optical elements disposed on the second surface so as to respectively correspond to the plurality of surface emitting laser elements; and an anti-reflection structure between the substrate and the plurality of optical elements, the anti-reflection structure includes at least one of (i) a structure including a region portion through which the light from each of the plurality of surface emitting laser elements passes, the region portion having an average refractive index that continuously changes in a thickness direction of the region portion, or (ii) an anti-reflection film including a laminated film composed of a plurality of films.",
    "2. The optical device according to claim 1, wherein the anti-reflection structure includes a sub-wavelength structure.",
    "3. The optical device according to claim 1, wherein the plurality of optical elements are separated from each other on a planar view.",
    "4. The optical device according to claim 1, wherein the plurality of optical elements include a resin material.",
    "5. The optical device according to claim 1, wherein the second surface includes a step formed between portions overlapping the plurality of optical elements and a surrounding portion of the portions on a planar view.",
    "6. The optical device according to claim 1, further comprising a film that enhances surface free energy, so that, on the second surface, surface free energy of portions overlapping the plurality of optical elements on a planar view is made higher than surface free energy of a surrounding portion of the portions.",
    "7. The optical device according to claim 1, wherein the second surface includes a light-shielding member that covers a surrounding portion of portions overlapping the plurality of optical elements on a planar view.",
    "8. The optical device according to claim 1, wherein the second surface includes a conductive member that covers a surrounding portion of portions overlapping the plurality of optical elements on a planar view.",
    "9. The optical device according to claim 1, wherein, on the second surface, a plurality of concave lenses are respectively formed at portions overlapping the plurality of optical elements on a planar view.",
    "10. A lighting apparatus comprising: the optical device according to claim 1; and a projecting device configured to project light to an irradiated surface, the light being emitted by the plurality of surface emitting laser elements through the plurality of optical elements.",
    "11. A measuring apparatus comprising: the lighting apparatus according to claim 10; an imaging unit configured to image the light projected to the irradiated surface; and circuitry configured to measure a target object on the irradiated surface, based on image information of the light imaged by the imaging unit.",
    "12. A part-inspecting apparatus comprising the measuring apparatus according to claim 11, wherein the circuitry outputs a result of an appearance inspection of the target object, based on a result of measurement of the target object.",
    "13. A robot comprising: a multi joint arm; and the measuring apparatus according to claim 11, wherein the measuring apparatus is attached to the multi joint arm.",
    "14. An electronic device comprising the measuring apparatus according to claim 11, wherein the circuitry performs authentication of a user of the measuring apparatus, based on a result of measurement of the target object.",
    "15. A movable object comprising: the measuring apparatus according to claim 11; and circuitry configured to support driving of the movable object based on a result of measurement by the measuring apparatus.",
    "16. The optical device according to claim 1, wherein the anti-reflection structure has a triangular cross-section shape.",
    "17. The optical device according to claim 4, wherein the resin material is an energy-curable resin.",
    "18. The optical device according to claim 1, wherein the anti-reflection structure includes a sub-wavelength structure, wherein the second surface of the substrate includes a first surface portion on which the sub-wavelength structure is disposed, and a second surface portion on which the sub-wavelength structure is not disposed, the second surface portion surrounding each of the plurality of optical elements, and wherein each optical element includes a resin material."
  ],
  "description_excerpt": "The present invention relates to an optical device, a lighting apparatus, a measuring apparatus, a part-inspecting apparatus, a robot, an electronic device, and a movable object.\n\nVertical cavity surface emitting laser (VCSEL) elements are expected to be applied to high-power laser light sources because the temperature dependence of the oscillation wavelength is small. Furthermore, since an arrangement of VCSEL elements in a two-dimensional array is easy, VCSEL elements are suitable for three-dimensional scanning with laser light. In addition, a VCSEL chip including multiple laminated VCSEL elements has been developed as a high-power laser light source or a light source for three-dimensional laser scanning.\n\nHowever, regarding a VCSEL chip, the emission angle of the laser light emitted from each VCSEL element is large. For this reason, a surface emitting laser having a micro-lens formed on a substrate of a VCSEL chip has been proposed.\n\nNonetheless, regarding the above-described surface emitting laser, it is difficult to fabricate the micro-lens with high precision, and it is difficult to sufficiently reduce the emission angle.",
  "cpc": [
    "H01S 5/02253",
    "B25J 19/022",
    "G01N 2021/9518",
    "G01N 21/88",
    "G01N 21/8806",
    "G01S 17/02",
    "G01S 17/08",
    "G01S 17/88",
    "G01S 17/89",
    "G01S 7/4814",
    "H01S 2301/176",
    "H01S 5/02257",
    "H01S 5/02335",
    "H01S 5/04257",
    "H01S 5/18305",
    "H01S 5/18313",
    "H01S 5/18358",
    "H01S 5/18361",
    "H01S 5/18388",
    "H01S 5/34313",
    "H01S 5/34353",
    "H01S 5/423"
  ],
  "ipc": [
    "B25J 19/02",
    "G01N 21/88",
    "G01S 17/02",
    "H01S 5/02253",
    "H01S 5/02257",
    "H01S 5/183",
    "H01S 5/343",
    "H01S 5/42"
  ],
  "assignees": [
    "Ricoh Co Ltd"
  ],
  "inventors": [
    "Yusuke Ohta",
    "Toshiyuki Ikeoh",
    "Atsushi Sakai"
  ],
  "filing_date": "2020-03-13",
  "publication_date": "2023-02-14",
  "grant_date": "2023-02-14",
  "priority_date": "2019-03-18",
  "application_number": "US-202016818134-A",
  "family_id": "72515860",
  "cited_by_count": 2,
  "citations": [
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  ]
}