Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus

{
  "publication_number": "US5753911A",
  "country": "US",
  "kind": "A",
  "title": "Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus",
  "abstract": "An electrostatic actuator includes a movable plate arranged on a substrate through a gap, a movable electrode arranged on the movable plate, and a fixed electrode arranged on the substrate to oppose the movable electrode. The movable electrode and the fixed electrode are arranged not to overlap at any portion in a direction perpendicular to a surface of the fixed electrode. The movable electrode and the fixed electrode have comb-like shapes.",
  "claims": [
    "1. An electrostatic actuator comprising: a movable plate arranged on a substrate through a gap; a movable electrode arranged on said movable plate; and a fixed electrode arranged on said substrate to oppose said movable electrode, wherein said movable electrode and said fixed electrode are arranged not to overlap at any portion in a direction perpendicular to a surface of said fixed electrode.",
    "2. An actuator according to claim 1, wherein said movable electrode and said fixed electrode have comb-like shapes.",
    "3. An actuator according to claim 2, wherein when a distance between said movable electrode and said fixed electrode is represented by d, and a pitch of electrode fingers of said comb-like electrode is represented by W, the following relation is satisfied: d<W.",
    "4. An electrostatic actuator type probe, comprising a tip arranged at one end of said movable plate of said electrostatic actuator of any one of claims 1 to 3.",
    "5. A scanning probe microscope having said probe of claim 4, comprising: moving means for moving said probe relative to a sample; control means for controlling a voltage to be applied between a movable electrode and a fixed electrode to adjust a distance between said probe and said sample; and signal processing means for processing surface information of said sample which is obtained through said probe.",
    "6. A processing apparatus having said probe of claim 4, comprising: moving means for moving said probe relative to a sample as a target processing object; control means for controlling a voltage to be applied between a movable electrode and a fixed electrode to adjust a distance between said probe and said sample; and processing means for applying a voltage between said probe and said sample to process said sample.",
    "7. A recording/reproducing apparatus having said probe of claim 4, comprising: moving means for moving said probe relative to a recording medium; control means for controlling a voltage to be applied between a movable electrode and a fixed electrode to adjust a distance between said probe and said recording medium; means for recording information on said recording medium by using said probe; and means for reproducing the information recorded on said recording medium by using said probe."
  ],
  "cpc": [
    "G01Q 10/04",
    "B82Y 10/00",
    "B82Y 35/00",
    "G01Q 80/00",
    "G11B 9/1418",
    "H02N 1/006",
    "Y10S 977/725",
    "Y10S 977/851",
    "Y10S 977/864",
    "Y10S 977/872",
    "Y10S 977/891",
    "Y10S 977/904"
  ],
  "assignees": [
    "CANON KK"
  ],
  "filing_date": "1997-01-16",
  "publication_date": "1998-05-19",
  "grant_date": "1998-05-19",
  "priority_date": "1996-01-19",
  "application_number": "US-78384797-A",
  "family_id": "12184269",
  "citations": [
    "JPH04230723A",
    "JPS62281138A",
    "JPS63161552A",
    "JPS63161553A",
    "US4668865A",
    "US4906840A",
    "US5283437A",
    "US5574279A"
  ]
}