Patents full text · MLC-0201
CPC subclass G01Q
Scanning-probe techniques or apparatus; applications of scanning-probe techniques, e.g. scanning probe microscopy [spm]
| No. | Publication | Title | Published | Assignee |
|---|---|---|---|---|
| 1 | US5753911A | Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus | 1998-05-19 | CANON KK |
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