Specimen preparation and inspection in a dual-beam charged particle microscope

{
  "publication_number": "US10629409B2",
  "country": "US",
  "kind": "B2",
  "title": "Specimen preparation and inspection in a dual-beam charged particle microscope",
  "abstract": "A method of preparing a specimen in a dual-beam charged particle microscope having: an ion beam column, that can produce an ion beam that propagates along an ion axis; an electron beam column, that can produce an electron beam that propagates along an electron axis, comprising the following steps: Providing a precursor sample on a sample holder; Using said ion beam to cut a furrow around a selected portion of said sample; Attaching a manipulator needle to said portion, severing said portion from the rest of said sample, and using the needle to perform a lift-out of the portion away from the rest of the sample, particularly comprising: Configuring the manipulator needle to have multiple degrees of motional freedom, comprising at least: Eucentric tilt θ about a tilt axis that passes through an intersection point of said ion and electron axes and is perpendicular to said electron axis; Rotation φ about a longitudinal axis of the needle; Whilst maintaining said portion on said needle, using said ion beam to machine at least one surface of said portion, so as to create said specimen; Whilst maintaining said portion on said needle, inspecting it with said electron beam, for at least two different values of said φ rotation.",
  "claims": [
    "1. A method of preparing a specimen in a dual-beam charged particle microscope, the method comprising: using an ion beam to form a furrow around a selected portion of said sample; attaching a manipulator needle to said portion; severing said portion from the rest of said sample; using the needle to perform a lift-out of the portion away from the rest of the sample; configuring the manipulator needle to have multiple degrees of motional freedom, comprising at least: eucentric tilt θ about a tilt axis that passes through an intersection point of said ion and electron axes and is perpendicular to said electron axis; rotation φ about a longitudinal axis of the needle; whilst maintaining said portion on said needle, using said ion beam to machine at least one surface of said portion, so as to create said specimen; and whilst maintaining said portion on said needle, inspecting it with said electron beam, for at least two different values of said φ rotation.",
    "2. A method according to claim 1, wherein said inspecting step comprises performing transmissive electron tomography on said portion, at a range of values of said rotation φ.",
    "3. A method according to claim 2, in which said tomography is performed at a tilt value θ=0 corresponding to a needle orientation that is substantially perpendicular to said electron beam.",
    "4. A method according to claim 1, wherein: said needle holds a detachable tool comprising: a plate; and at least one appendage extending from said plate; wherein said portion is adhered to said appendage.",
    "5. A method according to claim 3, wherein said tool comprises a TEM Grid or Lift-Out Grid.",
    "6. A method according to claim 2, wherein a plurality of appendages extend from the plate, in a fanned arrangement.",
    "7. A dual-beam charged particle microscope comprising: an ion beam column, for producing an ion beam that propagates along an ion axis; an electron beam column, for producing an electron beam that propagates along an electron axis; a sample holder, for holding a sample; a manipulator needle, which can be attached to a portion of said sample; a detector, for detecting radiation emanating from said portion in response to irradiation by said electron beam; and a controller, for at least partially controlling operation of said microscope, wherein said needle has multiple degrees of motional freedom, comprising at least: eucentric tilt θ about a tilt axis that passes through an intersection point of said ion and electron axes and is perpendicular to said electron axis; and rotation φ about a longitudinal axis of the needle.",
    "8. A microscope according to claim 7, wherein said controller is configured to: select a first θ value, at which said manipulator needle is used to perform post-excision lift-out of said portion from said sample; and select a second θ value, different from said first θ value, at which said electron beam is used to inspect said portion.",
    "9. A microscope according to claim 8, wherein: said detector is configured to detect electrons transmitted through said portion during said irradiation; and during said inspection step, said controller is configured to: drive said needle to at least two different φ values; and at each of said φ values, record an output from said detector.",
    "10. A microscope according to claim 7, further includes a TEM grid comprising: a plate; and a plurality of appendages extending from said plate in a fanned arrangement.",
    "11. An apparatus comprising: a sample stage for supporting a sample; a manipulator needle arranged to pivot about an axis that passes through an intersection point of ion and electron column axes and is perpendicular to the electron column axis, and further arranged to rotate around a longitudinal axis of the manipulator needle; and a controller coupled to control at least the manipulator needle during lift-out, milling and imaging operations, the controller causing the manipulator to: during the lift-out operation, move the manipulator to a first location about the pivot point; during the milling operation move the manipulator to a second location about the pivot point, the second location different than the first location, wherein the portion is milled by an ion beam; and during the imaging operation, causes the manipulator to rotate around the longitudinal axis, wherein images are acquired with an electron beam.",
    "12. The apparatus of claim 11, wherein the first location is an intermediate location between horizontal and vertical orientations.",
    "13. The apparatus of claim 11, wherein the second location is a horizontal location.",
    "14. The apparatus of claim 11, wherein during the milling operation, the controller further causes the manipulator to rotate around the longitudinal axis.",
    "15. The apparatus of claim 11, wherein the imaging operation includes scanning transmission electron microscopy of the portion.",
    "16. The apparatus of claim 11, further including a detachable tool coupled to the end of the manipulator, the detachable tool including a plate and at least one appendage, the at least one appendage configured to couple to the portion.",
    "17. The apparatus of claim 16, wherein the detachable tool includes a plurality of appendages in a fanned arrangement.",
    "18. The apparatus of claim 11, wherein the manipulator includes an upper arm and a lower arm, the lower arm coupled to rotate around the longitudinal axis of the manipulator while the upper arm remains stationary.",
    "19. The apparatus of claim 11, wherein during the imaging operation, the controller causes the manipulator to rotate around to at least two locations, wherein an image of the portion is acquired at each of the two locations.",
    "20. The apparatus of claim 11, wherein during the imaging operation, the controller causes the manipulator to move to a horizontal location about the pivot point."
  ],
  "description_excerpt": "This application claims priority to European application EP 17182299.2 filed on Jul. 20, 2017.\n\nThe invention relates to a method of preparing a specimen in a dual-beam charged particle microscope having:\n\nCharged-particle microscopy is a well-known and increasingly important technique for imaging microscopic objects, particularly in the form of electron microscopy. Historically, the basic genus of electron microscope has undergone evolution into a number of well-known apparatus species, such as the Transmission Electron Microscope (TEM), Scanning Electron Microscope (SEM), and Scanning Transmission Electron Microscope (STEM), and also into various sub-species, such as so-called “dual-beam” apparatus (e.g. a FIB-SEM), which additionally employ a “machining” Focused Ion Beam (FIB), allowing supportive activities such as ion-beam milling or Ion-Beam-Induced Deposition (IBID), for example. More specifically:\n\nAs an alternative to the use of electrons as irradiating beam, charged particle microscopy can also be performed using other species of charged particle. In this respect, the phrase “charged particle” should be broadly interpreted as encompassing electrons, positive ions (e.g. Ga or He ions), negative ions, protons and positrons, for instance.\n\nIt should be noted that, in addition to imaging and performing (localized) surface modification (e.g. milling, etching, deposition, etc.), a charged particle microscope may also have other functionalities, such as performing spectroscopy, examining diffractograms, etc.",
  "cpc": [
    "H01J 37/26",
    "G01N 1/286",
    "G01N 1/32",
    "G01N 2001/2873",
    "G01N 23/2251",
    "G01Q 30/02",
    "G01Q 30/20",
    "H01J 2237/2007",
    "H01J 2237/20207",
    "H01J 2237/20242",
    "H01J 2237/20285",
    "H01J 2237/208",
    "H01J 2237/262",
    "H01J 2237/28",
    "H01J 2237/31745",
    "H01J 2237/31749",
    "H01J 37/20",
    "H01J 37/24",
    "H01J 37/244",
    "H01J 37/3053",
    "H01J 37/3056"
  ],
  "ipc": [
    "H01J 37/20",
    "H01J 37/244",
    "H01J 37/26",
    "H01J 37/305",
    "G01N 1/32"
  ],
  "assignees": [
    "FEI Co"
  ],
  "inventors": [
    "Frantisek Vaske",
    "Tomáŝ Vystavêl",
    "Daniel Bosák"
  ],
  "filing_date": "2018-07-16",
  "publication_date": "2020-04-21",
  "grant_date": "2020-04-21",
  "priority_date": "2017-07-20",
  "application_number": "US-201816036017-A",
  "family_id": "59383463",
  "cited_by_count": 2,
  "citations": [
    "EP0735564A2",
    "US20020166976A1",
    "JP2005062130A",
    "US20080258056A1",
    "US20100090345A1",
    "WO2011011661A2",
    "US20130248354A1",
    "US20160356729A1",
    "US20170122852A1",
    "US20190017904A1"
  ]
}