Charged particle microscope with a manipulator device, and method of preparing a specimen with said charged particle microscope

{
  "publication_number": "US11127560B2",
  "country": "US",
  "kind": "B2",
  "title": "Charged particle microscope with a manipulator device, and method of preparing a specimen with said charged particle microscope",
  "abstract": "The invention relates to a charged particle microscope (CPM) that at least includes a sample holder, for holding a sample, and a manipulator device arranged for transferring a lamella created in said sample out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end. The outer ends are movable for mechanically gripping and releasing said lamella. In embodiments, the elongated manipulator members comprise off-set parts that increase manoeuvrability, accessibility, and monitorability of the manipulator device during use.",
  "claims": [
    "1. A charged particle microscope comprising: a sample holder, for holding a sample; an ion beam column, for producing an ion beam that propagates along an ion axis onto said sample for creating a lamella in said sample; a detector, for detecting radiation emanating from said lamella and/or said sample in response to irradiation by said ion beam; a manipulator device that is arranged for transferring said lamella created in said sample out of said sample; and a controller, for at least partially controlling operation of said microscope, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, and a second elongated manipulator member with a second outer end, wherein said manipulator device is arranged such that said first and second outer ends are movable with respect to each other for mechanically gripping and releasing said lamella, and wherein the manipulator device further comprises an actuator element coupled to move the first or second elongated manipulator member.",
    "2. The charged particle microscope according to claim 1, wherein said first elongated manipulator member comprises a distal part having said first outer end, as well as comprising a proximal part connected to said distal part, wherein said proximal part extends substantially parallel to said distal part, and further comprising an intermediate part that connects said proximal part to said distal part, wherein said intermediate part extends substantially non-parallel to said distal part and/or non-parallel to said proximal part.",
    "3. The charged particle microscope according to claim 2, wherein said intermediate part is shaped such that said proximal part is positioned with an off-set with respect to the longitudinal axis of said distal part.",
    "4. The charged particle microscope according to claim 3, wherein said outer ends have gripping surfaces that define a gripping plane, and wherein said intermediate part is shaped such that said proximal part is positioned with an off-set in a direction normal to said gripping plane.",
    "5. The charged particle microscope according to claim 3, wherein said outer ends have gripping surfaces that define a gripping plane, and wherein said intermediate part is shaped such that said proximal part is positioned with an off-set in a direction parallel to said gripping plane.",
    "6. The charged particle microscope according to claim 3, wherein said outer ends have gripping surfaces that define a gripping plane, and wherein said intermediate part is shaped such that said proximal part is positioned with an off-set in a direction normal to said gripping plane as well as with an off-set in a direction parallel to said gripping plane.",
    "7. The charged particle microscope according to claim 3, wherein the shape of said second elongated manipulator member substantially conforms to the shape of said first elongated manipulator member.",
    "8. The charged particle microscope according to claim 1, further comprising a lamella support grid.",
    "9. The charged particle microscope according to claim 8, further comprising a mechanical support contour, wherein said lamella support grid is placed inside said mechanical support contour.",
    "10. The charged particle microscope according to claim 8, further comprising: a lamella holder for holding said lamella support; and an electron beam column, for producing an electron beam that propagates along an electron axis onto said lamella holder.",
    "11. A method of operating a charged particle microscope comprising the steps of: providing a sample in a sample holder; creating, using an ion beam column, a lamella in said sample; and transferring, using a manipulator device, said lamella out of said sample, wherein said manipulator device comprises a first elongated manipulator member with a first outer end, a second elongated manipulator member with a second outer end, and an actuator element coupled to move the first or second elongated manipulator member, wherein said manipulator device is arranged such that said first and second outer ends are movable with respect to each other, for mechanically gripping and releasing said lamella.",
    "12. The method according to claim 11, further comprising transferring said lamella to said lamella support.",
    "13. The method according to claim 12, further comprising transferring said lamella to said lamella support in said mechanical support contour.",
    "14. The method according to claim 11, 12, or 13, wherein during use of the manipulation device, signals obtained by a detector are used to monitor manipulation of the lamella.",
    "15. The method according to claim 14, wherein said signals are transformed into images, such as video.",
    "16. A manipulator device for transferring a lamella created in a sample out of the sample, the manipulator device comprising: a first elongated manipulator member with a first outer end; a second elongated manipulator member with a second outer end, wherein said manipulator device is arranged such that said first and second outer ends are movable with respect to each other, for mechanically gripping and releasing the lamella; and an actuator element coupled to move the first or second elongated manipulator member.",
    "17. The manipulator device of claim 16, wherein said first elongated manipulator member comprises a distal part having said first outer end, as well as comprising a proximal part connected to said distal part, wherein said proximal part extends substantially parallel to said distal part, and further comprising an intermediate part that connects said proximal part to said distal part, wherein said intermediate part extends substantially non-parallel to said distal part and/or non-parallel to said proximal part.",
    "18. The manipulator device of claim 17, wherein said intermediate part is shaped such that said proximal part is positioned with an off-set with respect to the longitudinal axis of said distal part.",
    "19. The manipulator device of claim 18, wherein said outer ends have gripping surfaces that define a gripping plane, and wherein said intermediate part is shaped such that said proximal part is positioned with an off-set in a direction normal to said gripping plane.",
    "20. The manipulator device of claim 18, wherein said outer ends have gripping surfaces that define a gripping plane, and wherein said intermediate part is shaped such that said proximal part is positioned with an off-set in a direction normal to said gripping plane as well as with an off-set in a direction parallel to said gripping plane.",
    "21. The manipulator device of claim 18, wherein the shape of said second elongated manipulator member substantially conforms to the shape of said first elongated manipulator member."
  ],
  "description_excerpt": "The invention relates to a charged particle microscope with a manipulator device, and a method of preparing a specimen in such a charged particle microscope.\n\nCharged-particle microscopy is a well-known and increasingly important technique for imaging microscopic objects, particularly in the form of electron microscopy. Historically, the basic genus of electron microscope has undergone evolution into a number of well-known apparatus species, such as the Transmission Electron Microscope (TEM), Scanning Electron Microscope (SEM), and Scanning Transmission Electron Microscope (STEM), and also into various sub-species, such as so-called “dual-beam” apparatus (e.g. a FIB-SEM), which additionally employ a “machining” Focused Ion Beam (FIB), allowing supportive activities such as ion-beam milling or Ion-Beam-Induced Deposition (IBID), for example.\n\nA specimen to be viewed in a (S)TEM generally has to be very thin (e.g. with a thickness of the order of a few hundred nm, or less), so as to allow sufficient transmission of electrons therethrough. A thin (flake-like) specimen of this type is conventionally referred to as a lamella, and is generally cut from a larger (“bulk”) sample in a dual-beam apparatus such as a FIB-SEM.\n\nThe workflow for doing so includes providing a sample onto a sample holder, and using an ion beam to cut a furrow around a selected portion of said sample. Then a manipulator needle is welded to said portion, and said portion is severed from the rest of said sample. Finally, using the needle, a so called lift-out is performed wherein the portion is lifted away from the rest of the sample for forming a lamella.",
  "cpc": [
    "H01J 37/252",
    "B25J 15/0293",
    "B25J 7/00",
    "G02B 21/34",
    "H01J 2237/208",
    "H01J 2237/28",
    "H01J 2237/31749",
    "H01J 37/20",
    "H01J 37/244"
  ],
  "ipc": [
    "G02B 21/34",
    "H01J 37/20",
    "H01J 37/244",
    "H01J 37/252"
  ],
  "assignees": [
    "FEI Co"
  ],
  "inventors": [
    "Johannes A. H. W. G. Persoon",
    "Andreas Theodorus Engelen",
    "Ruud Schampers"
  ],
  "filing_date": "2019-08-15",
  "publication_date": "2021-09-21",
  "grant_date": "2021-09-21",
  "priority_date": "2018-08-21",
  "application_number": "US-201916542053-A",
  "family_id": "63350456",
  "cited_by_count": 2,
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}