MLchartDataset catalogue

Actual Gas Consumption

Term · Environment · MLC-T-ENV-000423

Quantity of gas used during wafer/substrate processing over some period based on a measured change in gas container weight or gas container pressure or on a measured volume of gas.

Table 1. Record
IdentifierMLC-T-ENV-000423
FieldEnvironment
References40 CFR 98.98 (CFR 2013)
Record as JSON 
{
  "id": "MLC-T-ENV-000423",
  "term": "Actual Gas Consumption",
  "field": "Environment",
  "definition": "Quantity of gas used during wafer/substrate processing over some period based on a measured change in gas container weight or gas container pressure or on a measured volume of gas.",
  "references": [
    "40 CFR 98.98 (CFR 2013)"
  ],
  "url": "https://mlchart.com/terminology/environment/actual-gas-consumption/"
}

Record 423 of 30,736 in Environment terminology (MLC-0121). Request the full dataset.