MLchartDataset catalogue

Modeled gas consumed

Term · Environment · MLC-T-ENV-017646

Quantity of gas used during wafer/substrate processing over some period based on a verified facility-specific engineering model used to apportion gas consumption.

Table 1. Record
IdentifierMLC-T-ENV-017646
FieldEnvironment
SubjectRegulatory activities
References40 CFR 98.98 (CFR 2013)
Record as JSON 
{
  "id": "MLC-T-ENV-017646",
  "term": "Modeled gas consumed",
  "field": "Environment",
  "term_source": "Modeled Gas Consumed",
  "definition": "Quantity of gas used during wafer/substrate processing over some period based on a verified facility-specific engineering model used to apportion gas consumption.",
  "subject": "Regulatory activities",
  "references": [
    "40 CFR 98.98 (CFR 2013)"
  ],
  "url": "https://mlchart.com/terminology/environment/modeled-gas-consumed/"
}

Record 17,174 of 29,894 in Environment terminology (MLC-0121). Request the full dataset.