MLchartDataset catalogue

Individual recipe

Term · Environment · MLC-T-ENV-014134

Specific combination of gases, under specific conditions of reactor temperature, pressure, flow, radio frequency (RF) power and duration, used repeatedly to fabricate a specific feature on a specific film or substrate.

Table 1. Record
IdentifierMLC-T-ENV-014134
FieldEnvironment
SubjectChemical substances
References40 CFR 98.98 (CFR 2013)
Record as JSON 
{
  "id": "MLC-T-ENV-014134",
  "term": "Individual recipe",
  "field": "Environment",
  "term_source": "Individual Recipe",
  "definition": "Specific combination of gases, under specific conditions of reactor temperature, pressure, flow, radio frequency (RF) power and duration, used repeatedly to fabricate a specific feature on a specific film or substrate.",
  "subject": "Chemical substances",
  "references": [
    "40 CFR 98.98 (CFR 2013)"
  ],
  "url": "https://mlchart.com/terminology/environment/individual-recipe/"
}

Record 13,770 of 29,894 in Environment terminology (MLC-0121). Request the full dataset.