MLchartDataset catalogue

Similar Process Recipe

Term · Environment · MLC-T-ENV-025608

With respect to recipes, means those recipes that are composed of the same set of chemicals and have the same flow stabilization times and where the documented differences, considered separately, in reactor pressure, individual gas flow rates, and applied radio frequency (RF) power are less than or equal to plus or minus 10 percent. For purposes of comparing and documenting recipes that are similar, facilities may use either the best known method provided by an equipment manufacturer or the process of record, for which emission factors for either have been measured.

Table 1. Record
IdentifierMLC-T-ENV-025608
FieldEnvironment
References40 CFR 98.98 (CFR 2013)
Record as JSON
{
  "id": "MLC-T-ENV-025608",
  "term": "Similar Process Recipe",
  "field": "Environment",
  "definition": "With respect to recipes, means those recipes that are composed of the same set of chemicals and have the same flow stabilization times and where the documented differences, considered separately, in reactor pressure, individual gas flow rates, and applied radio frequency (RF) power are less than or equal to plus or minus 10 percent. For purposes of comparing and documenting recipes that are similar, facilities may use either the best known method provided by an equipment manufacturer or the process of record, for which emission factors for either have been measured.",
  "references": [
    "40 CFR 98.98 (CFR 2013)"
  ],
  "url": "https://mlchart.com/terminology/environment/similar-process-recipe/"
}

Record 25,608 of 30,736 in Environment terminology (MLC-0121). Request the full dataset.