Similar Process Recipe
Term · Environment · MLC-T-ENV-025608
With respect to recipes, means those recipes that are composed of the same set of chemicals and have the same flow stabilization times and where the documented differences, considered separately, in reactor pressure, individual gas flow rates, and applied radio frequency (RF) power are less than or equal to plus or minus 10 percent. For purposes of comparing and documenting recipes that are similar, facilities may use either the best known method provided by an equipment manufacturer or the process of record, for which emission factors for either have been measured.
| Identifier | MLC-T-ENV-025608 |
|---|---|
| Field | Environment |
| References | 40 CFR 98.98 (CFR 2013) |
Record as JSON
{
"id": "MLC-T-ENV-025608",
"term": "Similar Process Recipe",
"field": "Environment",
"definition": "With respect to recipes, means those recipes that are composed of the same set of chemicals and have the same flow stabilization times and where the documented differences, considered separately, in reactor pressure, individual gas flow rates, and applied radio frequency (RF) power are less than or equal to plus or minus 10 percent. For purposes of comparing and documenting recipes that are similar, facilities may use either the best known method provided by an equipment manufacturer or the process of record, for which emission factors for either have been measured.",
"references": [
"40 CFR 98.98 (CFR 2013)"
],
"url": "https://mlchart.com/terminology/environment/similar-process-recipe/"
}
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