Sputtering

{
  "id": "MLC-T-ENV-026477",
  "term": "Sputtering",
  "field": "Environment",
  "definition": "1. Vacuum evaporation process in which portions of a coating material are physically removed from a substrate and deposited a thin film onto a different substrate.\n\n2. A process used to apply photovoltaic semi-conductor material to a substrate by a physical vapor deposition process where high-energy ions are used to bombard elemental sources of semiconductor material, which eject vapors of atoms that are then deposited in thin layers on a substrate.",
  "references": [
    "40 CFR 438 Appendix C (CFR 2013)",
    "Office of Energy Efficiency & Renewable Energy Glossary of Energy-Related Terms"
  ],
  "url": "https://mlchart.com/terminology/environment/sputtering/"
}