Sputtering

{
  "id": "MLC-T-CHM-011255",
  "term": "Sputtering",
  "field": "Chemistry",
  "definition": "The ejection of atoms, ions, or molecular fragments from a solid surface as a result of bombardment by energetic particles, usually ions. This process is a primary mechanism for sample erosion in surface analysis techniques such as secondary ion mass spectrometry (SIMS) and Auger electron spectroscopy (AES). The yield of sputtered particles depends on the projectile's mass and energy, the target material, and the angle of incidence.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 1979, 51, 2243. 'General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2247 (https://doi.org/10.1351/pac197951112243)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/sputtering/"
}