Preferential sputtering

{
  "id": "MLC-T-CHM-009379",
  "term": "Preferential sputtering",
  "field": "Chemistry",
  "definition": "The phenomenon where certain atomic or molecular species are ejected from a solid surface at a higher rate than others during sputtering. This occurs when a surface is bombarded with energetic particles, leading to a change in the surface composition compared to the bulk material. The sputtering yield varies for different elements in a compound or alloy.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1810 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/preferential-sputtering/"
}