Ablation by sputtering

{
  "id": "MLC-T-CHM-000040",
  "term": "Ablation by sputtering",
  "field": "Chemistry",
  "definition": "The process of removing material from a solid surface by bombarding it with energetic particles, typically ions. This physical phenomenon occurs when the kinetic energy of the incident particles is transferred to the surface atoms, causing them to be ejected. It is a common method for thin film deposition and surface analysis in analytical chemistry.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2021, 93, 647. 'Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)' on page 711 (https://doi.org/10.1515/pac-2019-0203)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ablation-by-sputtering/"
}