Sputter rate

{
  "id": "MLC-T-CHM-011253",
  "term": "Sputter rate",
  "field": "Chemistry",
  "definition": "The rate at which atoms or molecules are ejected from a solid surface due to bombardment by energetic particles, typically ions. It quantifies the speed of material removal during sputtering processes, which are used for thin film deposition or surface etching. The sputter rate is expressed in units of mass per unit area per unit time, or as a thickness removed per unit time.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2021, 93, 647. 'Glossary of methods and terms used in analytical spectroscopy (IUPAC Recommendations 2019)' on page 734 (https://doi.org/10.1515/pac-2019-0203)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/sputter-rate/"
}