Ionization by sputtering

{
  "id": "MLC-T-CHM-006121",
  "term": "Ionization by sputtering",
  "field": "Chemistry",
  "definition": "A process where ions are generated from a solid surface by bombarding it with a beam of energetic primary particles, typically ions or neutrals. The impact causes atoms and molecules from the surface to be ejected, some of which are ionized in the process. This method is employed in techniques like secondary ion mass spectrometry (SIMS) for surface analysis.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "ionization"
  ],
  "references": [
    "Orange Book, 2nd ed., p. 204 (https://media.iupac.org/publications/analytical_compendium/)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/ionization-by-sputtering/"
}