Sputtering yield

{
  "id": "MLC-T-CHM-011257",
  "term": "Sputtering yield",
  "field": "Chemistry",
  "definition": "The ratio of the number of atoms or molecules ejected from a solid surface to the number of incident energetic particles, usually ions, that strike the surface. This value is dimensionless and provides a measure of the efficiency of the sputtering process. It is influenced by the energy and mass of the incident particles and the binding energy of the target material.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1814 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/sputtering-yield/"
}