Fractional sputtering yield

{
  "id": "MLC-T-CHM-004631",
  "term": "Fractional sputtering yield",
  "field": "Chemistry",
  "definition": "The proportion of the sputtered material that consists of one chemical species, found by counting the atoms and ions of that species ejected from a sample and dividing by the count of all atoms and ions ejected. It is dimensionless, and the fractions of all species add up to one. The partial sputtering yield is a different quantity, namely the particles of one species removed for each primary ion that arrives.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "fractional ion yield",
    "negative-ion yield",
    "partial sputtering yield",
    "positive-ion yield",
    "total ion yield"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1805 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/fractional-sputtering-yield/"
}