Sputter yield

{
  "id": "MLC-T-CHM-011254",
  "term": "Sputter yield",
  "field": "Chemistry",
  "definition": "The average number of atoms or molecules ejected from a solid surface per incident energetic particle, typically an ion. This dimensionless quantity depends on the incident ion's energy, mass, and angle of incidence, as well as the target material's properties. It is a fundamental parameter in understanding sputtering processes in surface science and thin film deposition.",
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 1979, 51, 2243. 'General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2247 (https://doi.org/10.1351/pac197951112243)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/sputter-yield/"
}