Atomic mixing

{
  "id": "MLC-T-CHM-000899",
  "term": "Atomic mixing",
  "field": "Chemistry",
  "definition": "The intermingling of different atomic species within a material, typically induced by energetic particle bombardment. This process can lead to changes in surface composition and structure, particularly in the near-surface region. It is a phenomenon observed in techniques like secondary ion mass spectrometry (SIMS) and sputter depth profiling.",
  "subject": "Analytical Chemistry",
  "see_also": [
    "cascade mixing",
    "collision cascade"
  ],
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1798 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/atomic-mixing/"
}