Steady-state surface composition sputtering

{
  "id": "MLC-T-CHM-011351",
  "term": "Steady-state surface composition sputtering",
  "field": "Chemistry",
  "definition": "The surface composition reached when a homogeneous sample is sputtered under constant conditions, also called equilibrium surface composition sputtering. Preferential removal of one element enriches the surface in the slower-sputtering one until the sputtered flux matches the bulk composition. The altered surface layer therefore differs in composition from the bulk, being enriched in the element with the lower sputtering yield.",
  "synonyms": [
    "equilibrium surface composition sputtering"
  ],
  "subject": "Analytical Chemistry",
  "references": [
    "PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1815 (https://doi.org/10.1515/pac-2019-0404)"
  ],
  "url": "https://mlchart.com/terminology/chemistry/steady-state-surface-composition-sputtering/"
}