Transfer system, transfer device, and transfer method

{
  "publication_number": "US12131937B2",
  "country": "US",
  "kind": "B2",
  "title": "Transfer system, transfer device, and transfer method",
  "abstract": "According to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.",
  "claims": [
    "1. A transfer system comprising: a transfer robot comprising a fork and configured to transfer a transfer target object based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein the fork comprises arms that form a U shape and includes a conductor at a predetermined conductor location on each tip of the fork and at a predetermined conductor location on a base of the fork, wherein the fork comprises a suction hole at a predetermined suction location on each tip of the fork and at a predetermined suction location on the base of the fork, the suction holes connected by a suction path within the fork, suction within the suction holes and the suction path controlled to hold the transfer object wherein the transfer target object includes a plurality of position sensors and a plurality of capacitance sensors, the plurality electrostatic capacitance sensor configured to detect corresponding ones of the conductors of the fork, the plurality of position sensors being cameras configured to detect portions of the fork, the controller calculates a relative position between the fork and the transfer target object based on each of a detected result of the plurality of position sensors and a detected result of the plurality of position sensors, and the controller determines a teaching position of the fork with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the fork is disposed at the teaching position.",
    "2. The transfer system according to claim 1, wherein the operation instruction includes an instruction to align the fork with a transfer location of the transfer target object.",
    "3. The transfer system according to claim 2, wherein the transfer target object is one of a substrate or a ring assembly that surrounds the substrate.",
    "4. A transfer device for transferring a transfer target object, the transfer device comprising: a fork on which the transfer target object is placed; wherein the fork comprises arms that form a U shape and includes a conductor at a predetermined conductor location on each tip of the fork and at a predetermined conductor location on a base of the fork, wherein the fork comprises a suction hole at a predetermined suction location on each tip of the fork and at a predetermined suction location on the base of the fork, the suction holes connected by a suction path within the fork, suction within the suction holes and the suction path controlled to hold the transfer object wherein the transfer target object includes a plurality of position sensors and a plurality of capacitance sensors, the plurality electrostatic capacitance sensor configured to detect corresponding ones of the conductors of the fork, the plurality of position sensors being cameras configured to detect portions of the fork, an arm configured to move the fork, and a control device configured to control the arm based on a relative position between the fork and the transfer target object that is determined based on each of a detected result of the plurality of position sensors and a detected result of the plurality of position sensors.",
    "5. The transfer device according to claim 4, wherein the transfer target object is one of a substrate, a ring assembly that surrounds the substrate, or an upper electrode.",
    "6. The transfer device according to claim 4, wherein control device measures a central position of the transfer target object based on each of the detected result of the plurality of position sensors and the detected result of the plurality of position sensors.",
    "7. The transfer device according to claim 6, wherein the control device measures the central position of the transfer target object while the transfer target object is being transferred.",
    "8. The transfer device according to claim 6, wherein the control device measures the central position of the transfer target object when the transfer target object is received.",
    "9. The transfer device according to claim 6, wherein the control device measures the central position of the transfer target object when the transfer target object is placed in a substrate processing apparatus.",
    "10. The transfer device according to claim 6, wherein the control device corrects misalignment of the transfer target object when the central position is misaligned from a predetermined position.",
    "11. A transfer method performed by a transfer system, the transfer system including: a transfer robot comprising a fork and configured to transfer a transfer target object based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein the fork comprises arms that form a U shape and includes a conductor at a predetermined conductor location on each tip of the fork and at a predetermined conductor location on a base of the fork, wherein the fork comprises a suction hole at a predetermined suction location on each tip of the fork and at a predetermined suction location on the base of the fork, the suction holes connected by a suction path within the fork, suction within the suction holes and the suction path controlled to hold the transfer object, wherein the transfer target object includes a plurality of position sensors and a plurality of capacitance sensors, the plurality electrostatic capacitance sensor configured to detect corresponding ones of the conductors of the fork, the plurality of position sensors being cameras configured to detect portions of the fork, the transfer method comprising: calculating a relative position between the fork and the transfer target object based on each of a detected result of the plurality of position sensors and a detected result of the plurality of position sensors; calculating a misalignment of the relative position with respect to a reference position; correcting the misalignment when the misalignment amount is equal to or larger than a first threshold value and is less than a second threshold value, and issuing an alert to stop the transfer system when the misalignment amount is equal to or larger than the second threshold value."
  ],
  "description_excerpt": "The present disclosure relates to a transfer system, a transfer device, and a transfer method.\n\nA teaching method of a transfer device using an inspection wafer in which a plurality of cameras are disposed at an outer peripheral portion thereof has been known (for example, refer to Japanese Patent Application Publication No. 2019-102728).\n\nA method for adjusting a transfer position of a focus ring (annular member) to improve accuracy of a placement position of the focus ring (annular member) has been known (for example, refer to Japanese Patent Application Publication No. 2020-096122).\n\nThe present disclosure provides a technique capable of performing automation of teaching with respect to a transfer robot.\n\nAccording to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.",
  "cpc": [
    "H10P 72/53",
    "B25J 11/0095",
    "B25J 13/08",
    "B25J 15/0014",
    "B25J 19/02",
    "B25J 9/1664",
    "B25J 9/1692",
    "B25J 9/1697",
    "G05B 19/425",
    "G05B 2219/36433",
    "G05B 2219/39001",
    "G05B 2219/45031",
    "H01J 37/32642",
    "H01J 37/32807",
    "H01L 21/67173",
    "H01L 21/681",
    "H01L 21/68707",
    "H10P 72/0456",
    "H10P 72/0461",
    "H10P 72/0606",
    "H10P 72/0608",
    "H10P 72/3302",
    "H10P 72/3306",
    "H10P 72/50",
    "H10P 72/7602",
    "H10P 72/7611"
  ],
  "ipc": [
    "B25J 11/00",
    "B25J 13/08",
    "B25J 15/00",
    "B25J 9/16",
    "H01J 37/32",
    "H01L 21/67",
    "H01L 21/68",
    "H01L 21/687"
  ],
  "assignees": [
    "Tokyo Electron Ltd"
  ],
  "inventors": [
    "Norihiko Amikura",
    "Toshiaki TOYOMAKI",
    "Masatomo KITA"
  ],
  "filing_date": "2022-02-25",
  "publication_date": "2024-10-29",
  "grant_date": "2024-10-29",
  "priority_date": "2021-02-26",
  "application_number": "US-202217680296-A",
  "family_id": "83006685",
  "cited_by_count": 0,
  "citations": [
    "US4819167A",
    "US20060167583A1",
    "US20080220621A1",
    "US20060215152A1",
    "US20120101633A1",
    "US20150287625A1",
    "US20170032510A1",
    "JP2019102728A",
    "US20200161154A1",
    "US20220037177A1",
    "JP2020096122A"
  ]
}