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Patent · US11390525B2 · B2 · US

Carbon nanotube aggregate comprising a non-aligned portion

(11) Publication number
US11390525B2
(21) Application number
16/338,810
(22) Filing date
2017-08-08
(30) Priority date
2016-10-03
(43) Publication date
2022-07-19
(45) Date of grant
2022-07-19
(51) IPC
B32B 5/04; B32B 5/14; B82Y 30/00; C01B 32/158; H01L 21/687
(52) CPC
  • C01B Non-metallic elements; compounds thereof; {metalloids or compounds thereof not covered by subclass C01C}: 32/158
  • B65G Transport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors: 49/07
  • B82Y Specific uses or applications of nanostructures; measurement or analysis of nanostructures; manufacture or treatment of nanostructures: 30/00
  • H01L Semiconductor devices; electric solid state devices not otherwise provided for: 21/68757
  • H10P Generic processes or apparatus for the manufacture or treatment of devices covered by class H10: 72/0442, 72/3302, 72/7602, 72/7614, 72/7616
(73) Assignee
Nitto Denko Corp
(72) Inventors
Yoshiharu Hatakeyama; Tomoaki Ichikawa; Shotaro Masuda; Yohei Maeno
(54) Title
Carbon nanotube aggregate comprising a non-aligned portion
(57) Abstract

Provided is a carbon nanotube aggregate excellent in gripping force in a wide temperature range including high-temperature conditions. The carbon nanotube aggregate of the present invention is a carbon nanotube aggregate of a sheet shape, including a plurality of carbon nanotubes, wherein the carbon nanotube aggregate satisfies the following condition for FFM differential voltages when a frictional curve is obtained by scanning a front surface and/or a back surface of the carbon nanotube aggregate with a probe of a scanning probe microscope under a state in which the probe is brought into contact therewith: a ratio of an FFM differential voltage at 210° C. to an FFM differential voltage at 25° C. is from 0.3 to 5.

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Claims (6)

  1. A carbon nanotube aggregate of a sheet shape, comprising a plurality of carbon nanotubes, the carbon nanotube aggregate includes a non-aligned portion of the carbon nanotubes, wherein the thickness of the non-aligned portion is from 1 μm to 20 μm, wherein the ratio of a thickness of the non-aligned portion is from 0.1% to 40% with respect to a thickness of the carbon nanotube aggregate, and wherein the carbon nanotube aggregate satisfies the following condition for FFM differential voltages when a frictional curve is obtained by scanning a front surface and/or a back surface of the carbon nanotube aggregate with a probe of a scanning probe microscope under a state in which the probe is brought into contact therewith: a ratio of an FFM differential voltage at 210° C. to an FFM differential voltage at 25° C. is from 0.3 to 5.
  2. The carbon nanotube aggregate according to claim 1, wherein the carbon nanotube aggregate satisfies the following condition for the FFM differential voltages: a ratio of an FFM differential voltage at 300° C. to the FFM differential voltage at 25° C. is from 0.3 to 5.
  3. The carbon nanotube aggregate according to claim 2, wherein the carbon nanotube aggregate is used for a fixing jig for transportation.
  4. The carbon nanotube aggregate according to claim 1, wherein the carbon nanotube aggregate is used for a fixing jig for transportation.
  5. The carbon nanotube aggregate according to claim 1, wherein the non-aligned portion of the carbon nanotubes is present near an end portion in the lengthwise direction of the carbon nanotube aggregate.
  6. The carbon nanotube aggregate according to claim 1, wherein the non-aligned portion of the carbon nanotubes is present near an intermediate portion of the carbon nanotube aggregate.

Description

The present invention relates to a carbon nanotube aggregate.

In transporting an object to be processed, such as a material, a production intermediate, or a product, in a manufacturing process for a semiconductor device or the like, the object to be processed is transported through use of a carrying member, such as a movable arm or a movable table (see, for example, Patent Literatures 1 and 2). In such transportation, there is a demand for a member on which the object to be processed is to be mounted (fixing jig for transportation) to have such a strong gripping force as to prevent the object to be processed from shifting in position while being transported. In addition, such demand has increased year by year along with a demand for a faster manufacturing process.

However, a conventional fixing jig for transportation holds the object to be processed with an elastic material, such as a resin, and hence involves a problem in that the elastic material is liable to adhere to and remain on the object to be processed. In addition, the elastic material, such as a resin, involves a problem in that its physical properties, such as hardness, largely vary depending on temperature, and hence it is difficult for the material to maintain the same level of gripping force in a wide temperature range.

When a material such as ceramics is used for the fixing jig for transportation, contamination of the object to be processed is prevented, and temperature dependence of a gripping force is reduced.

Citations (35)

  • JP2001351961A
  • WO2008152940A1
  • KR20100029122A
  • CN101678970A
  • US20090001326A1
  • US20100301278A1
  • US20110039095A1
  • EP2269951A1
  • JP2010254572A
  • CN102007071A
  • US8900701B2
  • WO2012018117A1
  • CN103068730A
  • US20130244019A1
  • JP2013138152A
  • JP2014098107A
  • US20150273441A1
  • US9809458B2
  • US20150298974A1
  • JP2016501813A
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  • TW201613027A
  • US20170271193A1
  • JP2016046520A
  • WO2016027803A1
  • WO2017026336A1
  • JP2017035743A
  • US20180222038A1
  • JP2017094412A
  • WO2017159661A1
  • CN109562945A
  • US20190177165A1
  • US20200039826A1
  • US20200048093A1
Record as JSON
{
  "publication_number": "US11390525B2",
  "country": "US",
  "kind": "B2",
  "title": "Carbon nanotube aggregate comprising a non-aligned portion",
  "abstract": "Provided is a carbon nanotube aggregate excellent in gripping force in a wide temperature range including high-temperature conditions. The carbon nanotube aggregate of the present invention is a carbon nanotube aggregate of a sheet shape, including a plurality of carbon nanotubes, wherein the carbon nanotube aggregate satisfies the following condition for FFM differential voltages when a frictional curve is obtained by scanning a front surface and/or a back surface of the carbon nanotube aggregate with a probe of a scanning probe microscope under a state in which the probe is brought into contact therewith: a ratio of an FFM differential voltage at 210° C. to an FFM differential voltage at 25° C. is from 0.3 to 5.",
  "claims": [
    "1. A carbon nanotube aggregate of a sheet shape, comprising a plurality of carbon nanotubes, the carbon nanotube aggregate includes a non-aligned portion of the carbon nanotubes, wherein the thickness of the non-aligned portion is from 1 μm to 20 μm, wherein the ratio of a thickness of the non-aligned portion is from 0.1% to 40% with respect to a thickness of the carbon nanotube aggregate, and wherein the carbon nanotube aggregate satisfies the following condition for FFM differential voltages when a frictional curve is obtained by scanning a front surface and/or a back surface of the carbon nanotube aggregate with a probe of a scanning probe microscope under a state in which the probe is brought into contact therewith: a ratio of an FFM differential voltage at 210° C. to an FFM differential voltage at 25° C. is from 0.3 to 5.",
    "2. The carbon nanotube aggregate according to claim 1, wherein the carbon nanotube aggregate satisfies the following condition for the FFM differential voltages: a ratio of an FFM differential voltage at 300° C. to the FFM differential voltage at 25° C. is from 0.3 to 5.",
    "3. The carbon nanotube aggregate according to claim 2, wherein the carbon nanotube aggregate is used for a fixing jig for transportation.",
    "4. The carbon nanotube aggregate according to claim 1, wherein the carbon nanotube aggregate is used for a fixing jig for transportation.",
    "5. The carbon nanotube aggregate according to claim 1, wherein the non-aligned portion of the carbon nanotubes is present near an end portion in the lengthwise direction of the carbon nanotube aggregate.",
    "6. The carbon nanotube aggregate according to claim 1, wherein the non-aligned portion of the carbon nanotubes is present near an intermediate portion of the carbon nanotube aggregate."
  ],
  "description_excerpt": "The present invention relates to a carbon nanotube aggregate.\n\nIn transporting an object to be processed, such as a material, a production intermediate, or a product, in a manufacturing process for a semiconductor device or the like, the object to be processed is transported through use of a carrying member, such as a movable arm or a movable table (see, for example, Patent Literatures 1 and 2). In such transportation, there is a demand for a member on which the object to be processed is to be mounted (fixing jig for transportation) to have such a strong gripping force as to prevent the object to be processed from shifting in position while being transported. In addition, such demand has increased year by year along with a demand for a faster manufacturing process.\n\nHowever, a conventional fixing jig for transportation holds the object to be processed with an elastic material, such as a resin, and hence involves a problem in that the elastic material is liable to adhere to and remain on the object to be processed. In addition, the elastic material, such as a resin, involves a problem in that its physical properties, such as hardness, largely vary depending on temperature, and hence it is difficult for the material to maintain the same level of gripping force in a wide temperature range.\n\nWhen a material such as ceramics is used for the fixing jig for transportation, contamination of the object to be processed is prevented, and temperature dependence of a gripping force is reduced.",
  "cpc": [
    "C01B 32/158",
    "B65G 49/07",
    "B82Y 30/00",
    "H01L 21/68757",
    "H10P 72/0442",
    "H10P 72/3302",
    "H10P 72/7602",
    "H10P 72/7614",
    "H10P 72/7616"
  ],
  "ipc": [
    "B32B 5/04",
    "B32B 5/14",
    "B82Y 30/00",
    "C01B 32/158",
    "H01L 21/687"
  ],
  "assignees": [
    "Nitto Denko Corp"
  ],
  "inventors": [
    "Yoshiharu Hatakeyama",
    "Tomoaki Ichikawa",
    "Shotaro Masuda",
    "Yohei Maeno"
  ],
  "filing_date": "2017-08-08",
  "publication_date": "2022-07-19",
  "grant_date": "2022-07-19",
  "priority_date": "2016-10-03",
  "application_number": "US-201716338810-A",
  "family_id": "61831682",
  "cited_by_count": 0,
  "citations": [
    "JP2001351961A",
    "WO2008152940A1",
    "KR20100029122A",
    "CN101678970A",
    "US20090001326A1",
    "US20100301278A1",
    "US20110039095A1",
    "EP2269951A1",
    "JP2010254572A",
    "CN102007071A",
    "US8900701B2",
    "WO2012018117A1",
    "CN103068730A",
    "US20130244019A1",
    "JP2013138152A",
    "JP2014098107A",
    "US20150273441A1",
    "US9809458B2",
    "US20150298974A1",
    "JP2016501813A",
    "US9956546B2",
    "US20150274529A1",
    "TW201613027A",
    "US20170271193A1",
    "JP2016046520A",
    "WO2016027803A1",
    "WO2017026336A1",
    "JP2017035743A",
    "US20180222038A1",
    "JP2017094412A",
    "WO2017159661A1",
    "CN109562945A",
    "US20190177165A1",
    "US20200039826A1",
    "US20200048093A1"
  ]
}

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