Textured semiconductor wafer for solar cell

{
  "publication_number": "US6663944B2",
  "country": "US",
  "kind": "B2",
  "title": "Textured semiconductor wafer for solar cell",
  "abstract": "A textured semiconductor wafer for a solar cell includes a plurality of grooves being formed on a surface of the semiconductor wafer. The grooves are formed in the step of depositing a protector in the form of islands on the surface by spray process or screen-printing process, dipping the wafer into an isotropic etching solution to etch a portion of the surface where the protector is not deposited, and removing the protector.",
  "claims": [
    "1. A semiconductor wafer for a solar cell, comprising a plurality of grooves randomly formed on a surface of the semiconductor wafer of the solar cell, the grooves being formed by depositing a protector on the surface randomly, dipping the wafer into an isotropic etching solution to etch a portion of the surface where the protector is not deposited, and removing the protector.",
    "2. A semiconductor wafer of claim 1, further comprised of the protector being deposited by any one of a spray process and a screen-printing process.",
    "3. A semiconductor wafer of claim 1, further comprised of a shape of the groove being concaved to make the incident light bound the surface more than one time.",
    "4. A semiconductor wafer of claim 1, further comprised of the semiconductor wafer being a silicon wafer.",
    "5. A semiconductor wafer of claim 1, with the protector being deposited on more than 90% of an entire area of the surface.",
    "6. A semiconductor wafer of claim 1, further comprised of the protector being formed of organic or inorganic material being not reactive with etching solution and can be deposited and removed, and endure an annealing process.",
    "7. A semiconductor wafer of claim 1, further comprised of the protector being formed of a material selected from the group consisting of photoresist, silicon oxide, TiO 2, and NaNO 2.",
    "8. A semiconductor wafer of claim 1, with the isotropic etching solution being an acid-based solution.",
    "9. A semiconductor wafer of claim 8, further comprised of the isotropic etching solution being selected from the group consisting of HF, HNO 3, a mixture of HF and HNO 3, phosphoric acid, acetic acid, a mixture of phosphoric acid and water, and a mixture of acetic acid and water.",
    "10. A method of making a semiconductor wafer for a solar cell, comprising: forming a plurality of grooves randomly on a surface of the semiconductor wafer, the grooves being formed by the method comprising of: depositing a protector on the surface randomly; dipping the wafer into an isotropic etching solution to etch a portion of the surface where the protector is not deposited; and removing the protector.",
    "11. The method of claim 10, further comprised of the protector being deposited by any one of a spray process and a screen-printing process.",
    "12. The method of claim 10, further comprised of a shape of the groove being formed concave to make the incident light bound the surface more than one time.",
    "13. The method of claim 10, further comprised of the semiconductor wafer being a silicon wafer.",
    "14. The method of claim 10, with the protector being deposited on more than 90% of an entire area of the surface.",
    "15. The method of claim 10, further comprised of the protector being formed of organic or inorganic material being not reactive with etching solution and can be deposited and removed, and endure an annealing process.",
    "16. The method of claim 10, further comprised of the protector being formed of a material selected from the group consisting of photoresist, silicon oxide, TiO 2, and NaNO 2.",
    "17. The method of claim 10, with the isotropic etching solution being an acid-based solution.",
    "18. The method of claim 17, further comprised of the isotropic etching solution being selected from the group consisting of HF, HNO 3, a mixture of HF and HNO 3, phosphoric acid, acetic acid, a mixture of phosphoric acid and water, and a mixture of acetic acid and water."
  ],
  "cpc": [
    "H10F 77/703",
    "H10F 10/00",
    "H10F 71/00",
    "H10F 77/70",
    "Y02E 10/50",
    "Y10T 428/24479",
    "Y10T 428/2457"
  ],
  "assignees": [
    "SAMSUNG SDI CO LTD"
  ],
  "filing_date": "2001-11-26",
  "publication_date": "2003-12-16",
  "grant_date": "2003-12-16",
  "priority_date": "2001-01-03",
  "application_number": "US-99200201-A",
  "family_id": "19704233",
  "citations": [
    "US4916503A",
    "US5258077A",
    "US5804090A",
    "US5949123A",
    "US5997990A"
  ]
}