Methods and apparatus for initializing a planar motor

{
  "publication_number": "US6777896B2",
  "country": "US",
  "kind": "B2",
  "title": "Methods and apparatus for initializing a planar motor",
  "abstract": "Methods and apparatus are provided for initializing a planar motor. A magnet array floating above a coil array may reside in one of a definite number of positions upon the introduction of current into the coil array. Torque characteristics of the magnet array are acquired when driving the magnet array with no phase offsets. Phase offsets for driving the magnet array with substantially no yaw can then be determined by analyzing the torque characteristics.",
  "claims": [
    "1. A method for initializing a planar motor, the method comprising: providing current to a coil array to drive a planar magnet array in a first direction; determining first torque characteristics associated with driving the planar magnet array in the first direction; providing a first current offset using the first torque characteristics for driving the planar magnet array in the first direction with substantially no yaw, wherein the first current offset determined is 0, 90, 180, or 270 degrees.",
    "2. The method of claim 1, further comprising: providing current to a coil array to drive the planar magnet array in a second direction substantially orthogonal to the first direction; determining second torque characteristics associated with driving the planar magnet array in the second direction; providing a second current offset using the second torque characteristics for driving the planar magnet array in the second direction with substantially no yaw.",
    "3. The method of claim 2, wherein the second offset determined is 0, 90, 180, or 270 degrees.",
    "4. The method of claim 3, wherein the first and second torque characteristics are determined using interferometers.",
    "5. The method of claim 2, wherein providing first and second current offsets comprises determining the relative position of the planar magnet array with respect to the coil array.",
    "6. The method of claim 5, wherein determining the relative position of the planar magnet array with respect to the coil array comprises referencing a database entry using the first and second torque characteristics.",
    "7. The method of claim 5, wherein determining the relative position of the planar magnet array comprises selecting one possible relative position out of a plurality of possible relative positions.",
    "8. The method of claim 5, wherein the coil array comprises a plurality of coils, each coil fixed in position with respect to the other coils.",
    "9. The method of claim 8, wherein the coil array is square and comprises at least 25 coils.",
    "10. The method of claim 8, wherein the planar magnet array comprises a plurality of magnets, each magnet fixed in position with respect to the other magnets.",
    "11. The method of claim 10, further comprising driving the planar magnet stage to an initial position.",
    "12. The method of claim 11, wherein the planar magnet stage is suspended by flux generated by the coil array.",
    "13. A method for initializing a stage device including a planar motor that positions the stage using a position detector, the method comprising: providing current to a coil array to drive a magnet array of the planar motor in a first direction; detecting first torque characteristics associated with driving the magnet array in the first direction by using a position detector; providing a first current offset using the first torque characteristics for driving the magnet array in the first direction with substantially no yaw, wherein the first current offset determined is 0, 90, 180, or 270 degrees.",
    "14. The method of claim 13, further comprising: providing current to a coil array to drive the planar magnet array in a second direction substantially orthogonal to the first direction; determining second torque characteristics associated with driving the planar magnet array in the second direction; providing a second current offset using the second torque characteristics for driving the planar magnet array in the second direction with substantially no yaw.",
    "15. A method for initializing a photolithography system including an illumination system that irradiates radian energy and a planar motor that positions a movable stage relative to the path of said radiant energy using a position detector, the method comprising: providing current to a coil array to drive a magnet array of the planar motor in a first direction; detecting first torque characteristics associated with driving the magnet array in the first direction utilizing by using a position detector; providing a first current offset using the first torque characteristics for driving the magnet array in the first direction with substantially no yaw, wherein the first current offset determined is 0, 90, 180, or 270 degrees.",
    "16. The method of claim 15, further comprising: providing current to a coil array to drive the planar magnet array in a second direction substantially orthogonal to the first direction; determining second torque characteristics associated with driving the planar magnet array in the first direction; providing a second current offset using the second torque characteristics for driving the planar magnet array in the second direction with substantially no yaw.",
    "17. A method for making an object, the method including a photolithography process using the method of initializing a photolithography system of claim 15.",
    "18. A photolithography system, comprising: a drive system operable to provide current to a coil array to drive a planar magnet array in a first direction; and a detector system operable to determine first torque characteristics associated with driving the planar magnet array in the first direction; wherein the drive system is further operable to provide a first current offset using the first torque characteristics for driving the planar magnet array in the first direction with substantially no yaw, wherein the first current offset determined is 0, 90, 180, or 270 degrees.",
    "19. The photolithography system of claim 18, wherein the drive system is operable to provide current to a coil array to drive the planar magnet array in a second direction substantially orthogonal to the first direction.",
    "20. The photolithography system of claim 19, wherein the detector system is configured determining second torque characteristics associated with driving the planar magnet array in the second direction.",
    "21. The photolithography system of claim 20, wherein the drive system is operable to provide a second current offset using the second torque characteristics for driving the planar magnet array in the second direction with substantially no yaw.",
    "22. A photolithography system, comprising: means for providing current to a coil array to drive a planar magnet array in a first direction; means for determining first torque characteristics associated with driving the planar magnet array in the first direction; and means for providing a first current offset using the first torque characteristics for driving the planar magnet array in the first direction with substantially no yaw, wherein the first current offset determined is 0, 90, 180, or 270 degrees.",
    "23. The photolithography system of claim 22, further comprising: means for providing current to a coil array to drive the planar magnet array in a second direction substantially orthogonal to the first direction; means for determining second torque characteristics associated with driving the planar magnet array in the second direction; means for providing a second current offset using the second torque characteristics for driving the planar magnet array in the second direction with substantially no yaw."
  ],
  "cpc": [
    "G03F 7/70758",
    "H02K 2201/18",
    "H02K 41/031",
    "H02P 6/006"
  ],
  "assignees": [
    "NIKON CORP"
  ],
  "filing_date": "2002-07-09",
  "publication_date": "2004-08-17",
  "grant_date": "2004-08-17",
  "priority_date": "2002-07-09",
  "application_number": "US-19308002-A",
  "family_id": "30114461",
  "citations": [
    "JPH01198813A",
    "JPH10206104A",
    "JPS54145911A",
    "US5319336A",
    "US5548195A",
    "US5777721A",
    "US5925956A",
    "US6003230A",
    "US6144118A",
    "WO0046911A1"
  ]
}