Patent · US9649763B2 · B2 · US
Micro-nano tools with changeable tips for micro-NANO manipulation
- (11) Publication number
- US9649763B2
- (21) Application number
- 14/123,633
- (22) Filing date
- 2012-06-01
- (30) Priority date
- 2011-06-03
- (43) Publication date
- 2017-05-16
- (45) Date of grant
- 2017-05-16
- (51) IPC
- B25J 15/04; B25J 15/12; B25J 7/00; B81C 3/00; H01J 37/20
- (52) CPC
- B25J Manipulators; chambers provided with manipulation devices: 7/00, 15/04, 15/0491, 15/12
- B81B Microstructural devices or systems, e.g. micromechanical devices: 2201/12, 2201/13
- B81C Processes or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems: 3/008
- H01J Electric discharge tubes or discharge lamps: 2237/206, 2237/208, 37/20
- (72) Inventors
- Yu Sun; Ko Lun Chen
- (54) Title
- Micro-nano tools with changeable tips for micro-NANO manipulation
- (57) Abstract
The present invention relates to modular system for micro-nano manipulation of samples. The modular system of the present invention comprises changeable tool tips which may be provided in an array, and a tool body. Each changeable tool tip comprises an end effector connected to a base having mating structures. The tool body includes an arm having slits having dimensions and being disposed on the arm so as to detachably couple with the mating structures of the tool tip. The slits may include an opening with rounded corners for receiving the mating structures, and tapered side walls for frictionally fitting the mating structures. The present invention relates also to a connection system for connecting a micro-dimensional tool body to a changeable micro-dimensional tool tip and to a manipulation tool for use with changeable tool tips of the present invention.
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Claims (10)
- A modular micro-nano manipulation system, wherein said modular system comprises: (a) a changeable tool tip, said changeable tool tip comprising (i) an end effector, said end effector having two complementary arms configured for manipulating micro-sized or nano-sized objects, wherein said two complementary arms are connected at one fixed end, and (ii) a first mating member; (b) a tool body, said tool body including (i) two lateral arms, wherein each lateral arm includes a respective second mating member, each second mating member being disposed on the tool body so as to frictionally and detachably couple with the first mating member of the changeable tool tip, (ii) an active release plunger configured for releasing the changeable tool tip attached to the two lateral arms, the active release plunger being disposed between the two lateral arms, and (iii) an electrostatic actuator linked to the two lateral arms and the active release plunger; and (c) an external positioning system that provides motion in X, Y, and Z-directions to the two lateral arms.
- The modular system of claim 1, wherein said first mating member comprises coupling means extending from the changeable tool tip and wherein each of said second mating members comprises a respective slit disposed on the tool body, each of said slits configured for detachably receiving at least a portion of the coupling means.
- The modular system of claim 2, wherein each of the slits includes respective tapered side walls.
- The modular system of claim 1, wherein said first mating member and said second mating members are provided with mating interfaces so as to allow transfer of mechanical forces, electrical signals, or thermal energy between the tool body and the changeable tool tip.
- The modular system of claim 1, wherein said changeable tool tip is included in a tool rack, said tool rack comprising an array of tool tips.
- The modular system of claim 5, wherein said array of tool tips are tethered to the tool rack.
- The modular system of claim 1, wherein the end effector comprises a gripper.
- The modular system of claim 1, wherein said changeable tool tip is less than 100 micrometers in size.
- The modular system of claim 1, wherein the tool tip further includes a base, wherein the first mating member comprises a structural means disposed on one side of the base and wherein the end effector extends from another side of the base.
- The modular system of claim 1, wherein the end effector is less than 1 micrometer in thickness.
Description
This invention relates to micro/nano tools with changeable tips for micro/nano manipulation, and more particularly relates to modular systems of a micro/nano tool with changeable tool tips for quick and reliable tool tip customization for micro/nano manipulation.
Micro-nano manipulation tools, such as those constructed by micro-nano fabrication, including microelectromechanical systems (MEMS) based manipulation tools, have found a range of applications in various fields. These miniaturized tools extend the dexterity of human operators and enable physical interactions for material characterization, in-situ sample preparation and manipulation, as well as for the prototyping of novel micro and nano devices. These micro-nano tools can be applied to assemble nano-scaled structured into a device or system (e.g., NEMS).
The majority of MEMS based manipulation devices are constructed as a single piece, where the structural, actuating, and sensing components of the device are all physically interconnected. This configuration, however, has several disadvantages in the following aspects:
(1) Tool Customization
With the entire MEMS device fabricated as a single piece, any design modification would require the entire tool to be refabricated. In the case of MEMS based manipulation tools, tool tips are often customized according to a specific application. Typical changes in tool tips include size, shape, material, and surface treatments, while the rest of the device body remains unchanged. This customization process is highly inefficient.
Citations (14)
- US5332275A
- US5895084A
- US5899513A
- EP1029637A1
- US6676416B1
- US20040135388A1
- US7018575B2
- US7096568B1
- US7622813B2
- US6923669B1
- US20050275232A1
- US20060043749A1
- US7461882B2
- US7900336B2
Record as JSON
{
"publication_number": "US9649763B2",
"country": "US",
"kind": "B2",
"title": "Micro-nano tools with changeable tips for micro-NANO manipulation",
"abstract": "The present invention relates to modular system for micro-nano manipulation of samples. The modular system of the present invention comprises changeable tool tips which may be provided in an array, and a tool body. Each changeable tool tip comprises an end effector connected to a base having mating structures. The tool body includes an arm having slits having dimensions and being disposed on the arm so as to detachably couple with the mating structures of the tool tip. The slits may include an opening with rounded corners for receiving the mating structures, and tapered side walls for frictionally fitting the mating structures. The present invention relates also to a connection system for connecting a micro-dimensional tool body to a changeable micro-dimensional tool tip and to a manipulation tool for use with changeable tool tips of the present invention.",
"claims": [
"1. A modular micro-nano manipulation system, wherein said modular system comprises: (a) a changeable tool tip, said changeable tool tip comprising (i) an end effector, said end effector having two complementary arms configured for manipulating micro-sized or nano-sized objects, wherein said two complementary arms are connected at one fixed end, and (ii) a first mating member; (b) a tool body, said tool body including (i) two lateral arms, wherein each lateral arm includes a respective second mating member, each second mating member being disposed on the tool body so as to frictionally and detachably couple with the first mating member of the changeable tool tip, (ii) an active release plunger configured for releasing the changeable tool tip attached to the two lateral arms, the active release plunger being disposed between the two lateral arms, and (iii) an electrostatic actuator linked to the two lateral arms and the active release plunger; and (c) an external positioning system that provides motion in X, Y, and Z-directions to the two lateral arms.",
"2. The modular system of claim 1, wherein said first mating member comprises coupling means extending from the changeable tool tip and wherein each of said second mating members comprises a respective slit disposed on the tool body, each of said slits configured for detachably receiving at least a portion of the coupling means.",
"3. The modular system of claim 2, wherein each of the slits includes respective tapered side walls.",
"4. The modular system of claim 1, wherein said first mating member and said second mating members are provided with mating interfaces so as to allow transfer of mechanical forces, electrical signals, or thermal energy between the tool body and the changeable tool tip.",
"5. The modular system of claim 1, wherein said changeable tool tip is included in a tool rack, said tool rack comprising an array of tool tips.",
"6. The modular system of claim 5, wherein said array of tool tips are tethered to the tool rack.",
"7. The modular system of claim 1, wherein the end effector comprises a gripper.",
"8. The modular system of claim 1, wherein said changeable tool tip is less than 100 micrometers in size.",
"9. The modular system of claim 1, wherein the tool tip further includes a base, wherein the first mating member comprises a structural means disposed on one side of the base and wherein the end effector extends from another side of the base.",
"10. The modular system of claim 1, wherein the end effector is less than 1 micrometer in thickness."
],
"description_excerpt": "This invention relates to micro/nano tools with changeable tips for micro/nano manipulation, and more particularly relates to modular systems of a micro/nano tool with changeable tool tips for quick and reliable tool tip customization for micro/nano manipulation.\n\nMicro-nano manipulation tools, such as those constructed by micro-nano fabrication, including microelectromechanical systems (MEMS) based manipulation tools, have found a range of applications in various fields. These miniaturized tools extend the dexterity of human operators and enable physical interactions for material characterization, in-situ sample preparation and manipulation, as well as for the prototyping of novel micro and nano devices. These micro-nano tools can be applied to assemble nano-scaled structured into a device or system (e.g., NEMS).\n\nThe majority of MEMS based manipulation devices are constructed as a single piece, where the structural, actuating, and sensing components of the device are all physically interconnected. This configuration, however, has several disadvantages in the following aspects:\n\n(1) Tool Customization\n\nWith the entire MEMS device fabricated as a single piece, any design modification would require the entire tool to be refabricated. In the case of MEMS based manipulation tools, tool tips are often customized according to a specific application. Typical changes in tool tips include size, shape, material, and surface treatments, while the rest of the device body remains unchanged. This customization process is highly inefficient.",
"cpc": [
"B25J 7/00",
"B25J 15/04",
"B25J 15/0491",
"B25J 15/12",
"B81B 2201/12",
"B81B 2201/13",
"B81C 3/008",
"H01J 2237/206",
"H01J 2237/208",
"H01J 37/20"
],
"ipc": [
"B25J 15/04",
"B25J 15/12",
"B25J 7/00",
"B81C 3/00",
"H01J 37/20"
],
"inventors": [
"Yu Sun",
"Ko Lun Chen"
],
"filing_date": "2012-06-01",
"publication_date": "2017-05-16",
"grant_date": "2017-05-16",
"priority_date": "2011-06-03",
"application_number": "US-201214123633-A",
"family_id": "47258208",
"cited_by_count": 0,
"citations": [
"US5332275A",
"US5895084A",
"US5899513A",
"EP1029637A1",
"US6676416B1",
"US20040135388A1",
"US7018575B2",
"US7096568B1",
"US7622813B2",
"US6923669B1",
"US20050275232A1",
"US20060043749A1",
"US7461882B2",
"US7900336B2"
]
}
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