MLchartDataset catalogue

Process Sub-Type

Term · Environment · MLC-T-ENV-022299

Set of similar manufacturing steps, more closely related within a broad process type. For example, the chamber cleaning process type includes in-situ plasma chamber cleaning, remote plasma chamber cleaning, and in-situ thermal chamber cleaning sub-types.

Table 1. Record
IdentifierMLC-T-ENV-022299
FieldEnvironment
References40 CFR 98.98 (CFR 2013)
Record as JSON 
{
  "id": "MLC-T-ENV-022299",
  "term": "Process Sub-Type",
  "field": "Environment",
  "definition": "Set of similar manufacturing steps, more closely related within a broad process type. For example, the chamber cleaning process type includes in-situ plasma chamber cleaning, remote plasma chamber cleaning, and in-situ thermal chamber cleaning sub-types.",
  "references": [
    "40 CFR 98.98 (CFR 2013)"
  ],
  "url": "https://mlchart.com/terminology/environment/process-sub-type/"
}

Record 22,299 of 30,736 in Environment terminology (MLC-0121). Request the full dataset.