Overhead substrate handling and storage system

{
  "publication_number": "US10109516B2",
  "country": "US",
  "kind": "B2",
  "title": "Overhead substrate handling and storage system",
  "abstract": "A method for operating a material handling system including an overhead rack defining a plurality of storage positions, first and second side rails disposed above the overhead rack, a first cross rail movably coupled to the first and second side rails, and a first transport vehicle movably coupled to the first cross rail includes positioning the first transport vehicle above at least one interior window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the interior window to interface with a first load port of a first tool disposed below the overhead rack. The first transport vehicle is positioned above at least one periphery window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the periphery window to interface with a second load port of a second tool disposed below the overhead rack.",
  "claims": [
    "1. A method for operating a material handling system including an overhead rack defining a plurality of storage positions, first and second side rails disposed above said overhead rack, a first cross rail movably coupled to said first and second side rails, and a first transport vehicle movably coupled to said first cross rail, comprising: positioning said first cross rail and said first transport vehicle above at least one interior window defined in said overhead rack; descending at least a portion of said first transport vehicle through said at least one interior window to interface with a first load port of a first tool disposed below said overhead rack; positioning said first cross rail and said first transport vehicle above at least one periphery window defined in said overhead rack; and descending at least a portion of said first transport vehicle through said at least one periphery window to interface with a second load port of a second tool disposed below said overhead rack.",
    "2. The method of claim 1, further comprising interfacing a pod coupled to said first transport vehicle with said first load port.",
    "3. The method of claim 2, further comprising rotating said pod using said first transport vehicle to align said pod with said first load port.",
    "4. The method of claim 1, further comprising interfacing a pod coupled to said first transport vehicle with said second load port.",
    "5. The method of claim 1, wherein said material handling system includes a first overhead rail disposed along a first edge of said overhead rack parallel to said first and second side rails, a second transport vehicle movably coupled to said first overhead rail, a second overhead rail disposed along a second edge of said overhead rack parallel to said first and second side rails, and a third transport vehicle movably coupled to said first overhead rail, and the method further comprises: positioning said second transport vehicle to engage a first pod disposed at a first input/output port position defined in said overhead rack along said first edge; and positioning said third transport vehicle to engage a second pod disposed at a second input/output port position defined in said overhead rack along said second edge.",
    "6. The method of claim 1, wherein said material handling system includes a second cross rail movably coupled to said first and second side rails and a second transport vehicle movably coupled to said second cross rail, and the method further comprises engaging said first cross rail with said second cross rail to push said first cross rail along said first and second cross rails.",
    "7. The method of claim 1, wherein said material handling system includes a purge nest disposed on said overhead rack and having at least one gas port, and the method further comprises engaging said gas port with a pod supported by said overhead rack.",
    "8. The method of claim 7, wherein engaging said gas port further comprises providing a purge gas to said pod.",
    "9. A method for operating a material handling system including an overhead rack defining a plurality of storage positions, first and second side rails disposed above said overhead rack, a first cross rail movably coupled to said first and second side rails, a first transport vehicle movably coupled to said first cross rail, a first overhead rail disposed outside of said overhead rack parallel to said first and second side rails, and a second transport vehicle movably coupled to said first overhead rail, comprising: positioning said first cross rail and said first transport vehicle above at least one interior window defined in said overhead rack; descending at least a portion of said first transport vehicle through said at least one interior window to interface with a first load port of a first tool disposed below said overhead rack; and descending at least a portion of said second transport vehicle below said overhead rack to access a second load port of a second tool disposed below said overhead rack.",
    "10. The method of claim 9, further comprising descending at least a portion of said first transport vehicle through at least one periphery window defined in said overhead rack to interface with a third load port of a third tool disposed below said overhead rack.",
    "11. The method of claim 9, further comprising interfacing a pod coupled to said first transport vehicle with said second load port.",
    "12. The method of claim 11, further comprising rotating said pod using said first transport vehicle to align said pod with said second load port.",
    "13. The method of claim 10, further comprising interfacing a pod coupled to said first transport vehicle with said third load port.",
    "14. The method of claim 9, wherein said material handling system includes a first overhead rail disposed along a first edge of said overhead rack parallel to said first and second side rails, a third transport vehicle movably coupled to said first overhead rail, a second overhead rail disposed along a second edge of said overhead rack parallel to said first and second side rails, and a fourth transport vehicle movably coupled to said first overhead rail, and the method further comprises: positioning said third transport vehicle to engage a first pod disposed at a first input/output port position defined in said overhead rack along said first edge; and positioning said fourth transport vehicle to engage a second pod disposed at a second input/output port position defined in said overhead rack along said second edge.",
    "15. The method of claim 9, wherein said material handling system includes a second cross rail movably coupled to said first and second side rails and a third transport vehicle movably coupled to said second cross rail, and the method further comprises engaging said first cross rail with said second cross rail to push said first cross rail along said first and second cross rails.",
    "16. The method of claim 9, wherein said material handling system includes a purge nest disposed on said overhead rack and having at least one gas port, and the method further comprises engaging said gas port with a pod supported by said overhead rack.",
    "17. The method of claim 16, wherein engaging said gas port further comprises providing a purge gas to said pod.",
    "18. A method for operating a material handling system including an overhead rack defining a plurality of storage positions, wherein said overhead rack defines at least one interior window devoid of storage locations and at least one periphery window along an edge of said overhead rack, first and second side rails disposed above said overhead rack, a first cross rail movably coupled to said first and second side rails to allow movement of said first cross rail in a first direction along said first and second side rails, a first transport vehicle movably coupled to said first cross rail and operable to move in a second direction perpendicular to said first direction along said first cross rail, a first overhead rail disposed outside of said overhead rack parallel to said first and second side rails, and a second transport vehicle movably coupled to said first overhead rail, comprising: positioning said first cross rail and said first transport vehicle at a first position above at least one interior window defined in said overhead rack; descending said first transport vehicle below said overhead rack through said interior window to interface with a first load port of a first tool disposed below said overhead rack; positioning said first cross rail and said first transport vehicle at a second position above at least one periphery window defined in said overhead rack; descending said first transport vehicle below said overhead rack through said periphery window; descending said second transport vehicle below said overhead rack to access a second load port of a second tool disposed below said overhead rack; and accessing an input/output port position defined in said overhead rack with said first and second transport vehicles."
  ],
  "description_excerpt": "Not applicable.\n\nThe disclosed subject matter relates generally to semiconductor manufacturing and, more particularly, to an overhead substrate handling and storage system.\n\nGrowing technological requirements and the worldwide acceptance of sophisticated electronic devices have created an unprecedented demand for large-scale, complex, integrated circuits. Competition in the semiconductor industry requires that products be designed, manufactured, and marketed in the most efficient manner possible. This requires improvements in fabrication technology to keep pace with the rapid improvements in the electronics industry. Meeting these demands spawns many technological advances in materials and processing equipment and significantly increases the number of integrated circuit designs. These improvements also require effective utilization of computing resources and other highly sophisticated equipment to aid, not only design and fabrication, but also the scheduling, control, and automation of the manufacturing process.\n\nTurning first to fabrication, integrated circuits, or microchips, are manufactured from modern semiconductor devices containing numerous structures or features, typically the size of a few micrometers or less. The features are placed in localized areas of a semiconducting substrate, and are either conductive, non-conductive, or semi-conductive (i.e., rendered conductive in defined areas with dopants). The fabrication process generally involves processing a number of wafers through a series of fabrication tools. Each fabrication tool performs one or more of four basic operations discussed more fully below.",
  "cpc": [
    "H10P 72/3221",
    "B65G 1/0464",
    "B65G 2201/0297",
    "H01L 21/677",
    "H01L 21/67733",
    "H10P 72/30"
  ],
  "ipc": [
    "B65G 1/04",
    "H01L 21/677"
  ],
  "assignees": [
    "GlobalFoundries Inc"
  ],
  "inventors": [
    "William J. Fosnight",
    "Eric Christensen",
    "Leslie Marshall",
    "Ryan John Gallagher",
    "Stephanie Waite",
    "Gabriel Gaxiola"
  ],
  "filing_date": "2016-05-25",
  "publication_date": "2018-10-23",
  "grant_date": "2018-10-23",
  "priority_date": "2012-06-21",
  "application_number": "US-201615164204-A",
  "family_id": "49774598",
  "cited_by_count": 3,
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}