Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator

{
  "publication_number": "US9263309B2",
  "country": "US",
  "kind": "B2",
  "title": "Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator",
  "abstract": "The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. The operation may be fully automated. In another aspect, the invention describes Cleanspace fabricators which use devices to routinely remove and place tooling.",
  "claims": [
    "1. An apparatus for a Cleanspace fabricator comprising: a multilevel environment; a vertically oriented cleanspace, wherein the multilevel environment is on a periphery of the vertically oriented cleanspace; multiple processing tools, wherein said multiple processing tools are oriented in the multilevel environment, wherein the multiple process tools are configured such that at least a portion of a port of each processing tool is located within the vertically oriented cleanspace and at least a portion of a tool body of each processing tool is not in the vertically oriented cleanspace; and an automated processing tool replacement system, wherein the automated processing tool replacement system comprises: a robotic tool handler capable of transporting a first processing tool, a connecting surface for the robotic tool handler, wherein said connecting surface is connectable to the processing tool, and a support structure for supporting the robotic tool handler, said support structure comprising an automation for transporting the robotic tool handler in at least one of a horizontal direction and a vertical direction.",
    "2. The apparatus of claim 1 wherein the support structure additionally comprises: wheels mounted proximate to a lowest portion of the support structure, wherein said support structure is functional to provide movement in the horizontal direction; and further comprising a mechanization attached to the wheels, wherein said mechanization is functional to elevate the robotic tool handler thereby providing movement in the vertical direction.",
    "3. The apparatus of claim 1 wherein the automation for transporting the robotic tool handler in the horizontal direction and the vertical direction comprises multiple rails and a drive unit operative to provide locomotion along at least one rail.",
    "4. The apparatus of claim 1 additionally comprising a mechanized apparatus operative to position one or more of the multiple processing tools in an operation location.",
    "5. The apparatus of claim 1 additionally comprising a robotic automation residing within the Cleanspace to move substrate lots from the first processing tool of the multiple processing tools to a second processing tool of the multiple processing tools.",
    "6. The apparatus of claim 1 additionally comprising circuitry functional to provide one or more of: wired or wireless electronic communication between at least two of: the first processing tool held by the robotic tool handler, a second processing tool adjacent to the robotic tool handler and cleanspace fabricator automation.",
    "7. The apparatus of claim 1 additionally comprising a second cleanspace wherein the automated processing tool replacement system resides within the second cleanspace.",
    "8. The apparatus of claim 1 additionally comprising electronically interlocked safety systems functional to control an ability of a processing tool body to be moved into or out of the robotic tool handler at various positions.",
    "9. The apparatus of claim 1 wherein the vertically oriented cleanspace has an airflow that is predominately horizontal; and wherein a dimension of length that the airflow traverses is less than a vertical height of the cleanspace.",
    "10. A method of operating a fabricator facility, the method comprising: obtaining the fabricator facility comprising: a multilevel environment; multiple processing tools, wherein said multiple processing tools are oriented in the multilevel environment; and an automated tool replacement system, wherein the automated tool replacement system comprises: a robotic tool handler capable of transporting a first processing tool, a connecting surface for the robotic tool handler, wherein said connecting surface is connectable to the first processing tool, and a support structure for supporting the robotic tool handler, said support structure comprising an automation for transporting the robotic tool handler in at least one of a horizontal direction and a vertical direction, wherein said support structure is supported along a track affixed to a ceiling or a floor; placing and replacing at least the first processing tool by a use of the robotic tool handler; and moving substrates from the first processing tool to a second processing tool within a Cleanspace by a robotic automation.",
    "11. The method of claim 10 additionally comprising the steps of: elevating the robotic tool handler; transporting the robotic tool handler in the horizontal direction to a location of the second processing tool in the fabricator; and removing the second processing tool from its operant position in the fabricator with the robotic tool handler.",
    "12. The method of claim 10 additionally comprising the step of performing at least one action comprising a manufacturing process for one or more of: a semiconductor device, a photonic device, a microelectronic mechanical devices, a biological composition; and a nanotechnology device.",
    "13. The method of claim 10 wherein the step of placing processing tools by the use of robotic tool handlers is performed automatically.",
    "14. An apparatus for transporting a processing tool to or from an operational position, the apparatus comprising: a processing tool replacement system; a robotic tool handler within said tool replacement system; and a support structure supporting the tool replacement system and comprising automation for transporting the tool replacement system in at least one of a horizontal direction and a vertical direction; and wherein the apparatus for transporting the processing tool resides within a cleanspace fabricator, wherein the cleanspace fabricator comprises: a multilevel environment; a vertically oriented cleanspace; and multiple processing tools, wherein said multiple processing tools are oriented in the multilevel environment.",
    "15. The apparatus of claim 14 wherein the multiple process tools are configured such that at least a portion of a port of each processing tool is located within the vertically oriented cleanspace and at least a portion of a tool body of each processing tool is not in the vertically oriented cleanspace.",
    "16. The apparatus of claim 15 additionally comprising a seal between a perimeter of the tool replacement system and a surface on a periphery of a cleanspace environment, said seal operative to preserve an integrity of an atmosphere defined by the cleanspace environment and an environment within the tool replacement system.",
    "17. The apparatus of claim 15 wherein the vertically oriented cleanspace has an airflow that is predominately horizontal; and wherein a dimension of length that the airflow traverses is less than a vertical height of the cleanspace.",
    "18. The apparatus of claim 17 whereas within the cleanspace fabricator is located a partially finished semiconductor device.",
    "19. The apparatus of claim 17 whereas within the cleanspace fabricator is located a partially produced microelectromechanical device.",
    "20. The apparatus of claim 17 whereas within the cleanspace fabricator is located a partially produced biomedical device."
  ],
  "description_excerpt": "The present invention relates to apparatus and methods which support cleanspace fabricators and in particular to an automated tool replacement system supporting vertical and horizontal arrangement of fabricator tools operating in cleanspace environments.\n\nCleanspace fabricator designs have been disclosed in previous patent applications that teach an arrangement of disparate tools in both vertical and horizontal dimensions. In some particular embodiments, fabricators tools are arranged in close proximity, essentially in a matrix design. Each fabricator tool is associated with a cleanspace and a work piece, such as a semiconductor substrate, is transported from one fabricator tool cleanspace to another. Self contained carriers for transporting the substrate from one fabricator tool to another have also been disclosed, as well automation for transporting such carriers. Such carriers can be designed to maintain a clean space environment for the substrate, and, in some embodiments, a carrier can also provide atmospheric control. In some implementations, fabricators with vertically arranged tools and disparate cleanspace environments can be built into a building structure itself. In such implementations, it is feasible to use conventional means, such as building elevators and forklifts to transport fabricator tools. However, some implementations provide for standalone fabricators in an open space, with vertically arranged fabricator tools. Stand alone implementations pose additional challenges for installing and removing tools.",
  "cpc": [
    "H10P 72/3206",
    "B65G 2814/0313",
    "B65G 65/005",
    "H01L 21/67017",
    "H01L 21/67178",
    "H01L 21/67706",
    "H01L 21/67712",
    "H01L 21/67733",
    "H01L 21/67736",
    "H10P 72/0402",
    "H10P 72/0458",
    "H10P 72/3202",
    "H10P 72/3221",
    "H10P 72/3222"
  ],
  "ipc": [
    "B65G 65/00",
    "G06F 19/00",
    "G06F 7/00",
    "H01L 21/67",
    "H01L 21/677"
  ],
  "assignees": [
    "FLITSCH FREDERICK A",
    "FUTRFAB INC"
  ],
  "inventors": [
    "FLITSCH FREDERICK A"
  ],
  "filing_date": "2015-05-04",
  "publication_date": "2016-02-16",
  "grant_date": "2016-02-16",
  "priority_date": "2005-06-18",
  "application_number": "US-201514703552-A",
  "family_id": "50975574",
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