Patent · US11088326B2 · B2 · US
Substrate for use in manufacturing display device and method for forming element on substrate
- (11) Publication number
- US11088326B2
- (21) Application number
- 16/716,428
- (22) Filing date
- 2019-12-16
- (30) Priority date
- 2013-05-30
- (43) Publication date
- 2021-08-10
- (45) Date of grant
- 2021-08-10
- (51) IPC
- H01L 23/544; H10K 99/00
- (52) CPC
- H10W Generic packages, interconnections, connectors or other constructional details of devices covered by class H10: 46/00, 46/101, 46/301, 46/607
- G09F Displaying; advertising; signs; labels or name-plates; seals: 9/00
- H01L Semiconductor devices; electric solid state devices not otherwise provided for: 2223/5442, 2223/54426, 2223/54486, 23/544, 27/3211, 27/3246, 2924/00, 2924/0002, 51/0002, 51/0012, 51/56
- H10K Organic electric solid-state devices: 59/122, 59/35, 71/10, 71/166, 71/191, 71/40
- (73) Assignee
- Samsung Display Co Ltd
- (72) Inventors
- Cheol-Gyu JEONG
- (54) Title
- Substrate for use in manufacturing display device and method for forming element on substrate
- (57) Abstract
A substrate is for use in manufacturing a display device. The substrate includes a first area that corresponds to pixel positions. The substrate further includes a second area adjacent to the first area. The substrate further includes a first mark disposed in the second area, wherein a first virtual line corresponds to the first mark. The substrate further includes a second mark disposed in the second area and spaced from the first mark, wherein a second virtual line corresponds to the second mark and intersects the first virtual line at a virtual reference point. The substrate further includes an indicator disposed in the second area, spaced from the first mark and the second mark, and corresponding to an opening of a mask, wherein a positional relation between the virtual reference point and a point of the indicator represents a positional relation between the substrate and the mask.
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Claims (20)
- A display device comprising: a first pixel electrode on a substrate; a first light emission layer on the first pixel electrode; a first mark on the substrate, wherein a first virtual line crosses a perimeter of the first mark in a plan view of the display device; a second mark disposed on the substrate and spaced from the first mark, wherein a second virtual line crosses a perimeter of the second mark and intersects the first virtual line in the plan view of the display device; and a first indicator comprising a same material as the first light emission layer, wherein a perimeter of the first indicator surrounds an intersection of the first virtual line and the second virtual line in the plan view of the display device.
- The display device of claim 1, wherein the first indicator is larger than at least one of the first mark and the second mark in the plan view of the display device.
- The display device of claim 1, wherein a size of the first indicator is substantially the same as a size of the first light emission layer in the plan view of the display device.
- The display device of claim 1, further comprising: a second pixel electrode on the substrate; a second emission layer disposed on the second pixel electrode and emitting a different color from the first light emission layer; a third mark on the substrate, wherein a third virtual line corresponds to the third mark and intersects the second virtual line; a second indicator comprising a same material as the second light emission layer and disposed at a position where the third virtual line and the second virtual line intersect.
- The display device of claim 4, wherein a size of the second indicator is substantially the same as a size of the second light emitting layer in the plan view of the display device.
- The display device of claim 4, wherein the third virtual line is substantially parallel to the first virtual line.
- The display device of claim 4, further comprising: a third pixel electrode on the substrate; a third light emission layer disposed on the third pixel electrode and emitting a different color from the first and the second light emission layers; a fourth mark on the substrate, wherein a fourth virtual line corresponds to the fourth mark and intersects the second virtual line; a third indicator comprising a same material as the third light emission layer and disposed at a position where the fourth virtual line and the second virtual line intersect.
- The display device of claim 7, wherein the fourth virtual line is substantially parallel to the first virtual line and the third virtual line.
- The display device of claim 7, wherein a size of the third indicator is substantially the same as a size of the third light emitting layer in the plan view of the display device.
- The display device of claim 1, wherein the first virtual line crosses a plurality of light emission layers emitting a same color.
- The display device of claim 1, wherein the first virtual line is perpendicular to the second virtual line.
- The display device of claim 1, wherein the first mark has a bar shape having two long sides parallel to the first virtual line.
- The display device of claim 12, wherein the second mark has a bar shape having two long sides parallel to the second virtual line.
- The display device of claim 1, wherein the first mark is positioned between the first indicator and the first light emission layer in the plan view of the display device.
- The display device of claim 1, wherein the first indicator is positioned closer to the first light emission layer than the second mark.
- A display device comprising: a first pixel electrode and a second pixel electrode disposed on a substrate; a first light emission layer disposed on the first pixel electrode; a second light emission layer disposed on the second pixel electrode and emitting a different color from the first light emission layer; first marks on the substrate, wherein a first virtual line crosses a perimeter of one of the first marks in a plan view of the display device, and wherein a third virtual line crosses a perimeter of another of the first marks in the plan view of the display device; a second mark disposed on the substrate and spaced from the first marks, wherein a second virtual line crosses a perimeter of the second mark and intersects each of the first virtual line and the third virtual line in the plan view of the display device; a first indicator comprising a same material as the first light emission layer wherein a perimeter of the first indicator surrounds an intersection point of the first virtual line and the second virtual line in the plan view of the display device; and a second indicator comprising a same material as the second light emission layer, wherein a perimeter of the second indicator surrounds an intersection point of the third virtual line and the second virtual line in the plan view of the display device, and wherein the first marks do not comprise the same material as the first light emission layer and the same material as the second light emission layer.
- The display device of claim 16, wherein each of the first marks has a bar shape having two long sides parallel to the first virtual line.
- The display device of claim 16, wherein the second mark has a bar shape having two long sides parallel to the second virtual line.
- The display device of claim 16, wherein the second mark is one of second marks, the second virtual line crosses each of the second marks in the plan view of the display device, and the number of the second marks is smaller than the number of the first marks.
- The display device of claim 16, wherein the first virtual line is perpendicular to the second virtual line.
Description
The present invention relates to a substrate for a display device and a method for depositing a thin film.
An organic light emitting display typically includes a substrate and a plurality of pixels formed on the substrate. Each of the pixels includes a pixel circuit and an organic light emitting diode of which emission may be controlled by the pixel circuit. The organic light emitting diode may have a stacked structure that may include a pixel electrode, an organic emission layer, and (a portion of) a common electrode. The organic light emitting display may use lights emitted from a plurality of organic light emitting diodes to display an image.
The organic emission layer may be formed using a pattern mask that has a plurality of openings corresponding to a design of the organic emission layer. The pattern mask may be fixed to a frame with a tensile force being applied to the pattern mask. The combination of the mask and the frame may be arranged on the substrate inside a chamber. A deposition source may also be disposed inside the chamber. An organic material evaporated from the deposition source may pass through the opening of the pattern mask and may be deposited on the substrate so as to form the organic emission layer.
During the deposition process, if an error occurs in the alignment between the substrate and the pattern mask, the error may cause a process failure. Therefore, accuracy in the alignment between the substrate and the pattern mask is very important in manufacturing the organic light emitting display.
Citations (13)
- KR20050101578A
- US7498745B2
- KR20060102094A
- KR20070097218A
- US20100026173A1
- US20100245271A1
- US20110234550A1
- US20120154722A1
- US20140131667A1
- US20140239049A1
- US10541368B2
- US20160343944A1
- US20190044070A1
Record as JSON
{
"publication_number": "US11088326B2",
"country": "US",
"kind": "B2",
"title": "Substrate for use in manufacturing display device and method for forming element on substrate",
"abstract": "A substrate is for use in manufacturing a display device. The substrate includes a first area that corresponds to pixel positions. The substrate further includes a second area adjacent to the first area. The substrate further includes a first mark disposed in the second area, wherein a first virtual line corresponds to the first mark. The substrate further includes a second mark disposed in the second area and spaced from the first mark, wherein a second virtual line corresponds to the second mark and intersects the first virtual line at a virtual reference point. The substrate further includes an indicator disposed in the second area, spaced from the first mark and the second mark, and corresponding to an opening of a mask, wherein a positional relation between the virtual reference point and a point of the indicator represents a positional relation between the substrate and the mask.",
"claims": [
"1. A display device comprising: a first pixel electrode on a substrate; a first light emission layer on the first pixel electrode; a first mark on the substrate, wherein a first virtual line crosses a perimeter of the first mark in a plan view of the display device; a second mark disposed on the substrate and spaced from the first mark, wherein a second virtual line crosses a perimeter of the second mark and intersects the first virtual line in the plan view of the display device; and a first indicator comprising a same material as the first light emission layer, wherein a perimeter of the first indicator surrounds an intersection of the first virtual line and the second virtual line in the plan view of the display device.",
"2. The display device of claim 1, wherein the first indicator is larger than at least one of the first mark and the second mark in the plan view of the display device.",
"3. The display device of claim 1, wherein a size of the first indicator is substantially the same as a size of the first light emission layer in the plan view of the display device.",
"4. The display device of claim 1, further comprising: a second pixel electrode on the substrate; a second emission layer disposed on the second pixel electrode and emitting a different color from the first light emission layer; a third mark on the substrate, wherein a third virtual line corresponds to the third mark and intersects the second virtual line; a second indicator comprising a same material as the second light emission layer and disposed at a position where the third virtual line and the second virtual line intersect.",
"5. The display device of claim 4, wherein a size of the second indicator is substantially the same as a size of the second light emitting layer in the plan view of the display device.",
"6. The display device of claim 4, wherein the third virtual line is substantially parallel to the first virtual line.",
"7. The display device of claim 4, further comprising: a third pixel electrode on the substrate; a third light emission layer disposed on the third pixel electrode and emitting a different color from the first and the second light emission layers; a fourth mark on the substrate, wherein a fourth virtual line corresponds to the fourth mark and intersects the second virtual line; a third indicator comprising a same material as the third light emission layer and disposed at a position where the fourth virtual line and the second virtual line intersect.",
"8. The display device of claim 7, wherein the fourth virtual line is substantially parallel to the first virtual line and the third virtual line.",
"9. The display device of claim 7, wherein a size of the third indicator is substantially the same as a size of the third light emitting layer in the plan view of the display device.",
"10. The display device of claim 1, wherein the first virtual line crosses a plurality of light emission layers emitting a same color.",
"11. The display device of claim 1, wherein the first virtual line is perpendicular to the second virtual line.",
"12. The display device of claim 1, wherein the first mark has a bar shape having two long sides parallel to the first virtual line.",
"13. The display device of claim 12, wherein the second mark has a bar shape having two long sides parallel to the second virtual line.",
"14. The display device of claim 1, wherein the first mark is positioned between the first indicator and the first light emission layer in the plan view of the display device.",
"15. The display device of claim 1, wherein the first indicator is positioned closer to the first light emission layer than the second mark.",
"16. A display device comprising: a first pixel electrode and a second pixel electrode disposed on a substrate; a first light emission layer disposed on the first pixel electrode; a second light emission layer disposed on the second pixel electrode and emitting a different color from the first light emission layer; first marks on the substrate, wherein a first virtual line crosses a perimeter of one of the first marks in a plan view of the display device, and wherein a third virtual line crosses a perimeter of another of the first marks in the plan view of the display device; a second mark disposed on the substrate and spaced from the first marks, wherein a second virtual line crosses a perimeter of the second mark and intersects each of the first virtual line and the third virtual line in the plan view of the display device; a first indicator comprising a same material as the first light emission layer wherein a perimeter of the first indicator surrounds an intersection point of the first virtual line and the second virtual line in the plan view of the display device; and a second indicator comprising a same material as the second light emission layer, wherein a perimeter of the second indicator surrounds an intersection point of the third virtual line and the second virtual line in the plan view of the display device, and wherein the first marks do not comprise the same material as the first light emission layer and the same material as the second light emission layer.",
"17. The display device of claim 16, wherein each of the first marks has a bar shape having two long sides parallel to the first virtual line.",
"18. The display device of claim 16, wherein the second mark has a bar shape having two long sides parallel to the second virtual line.",
"19. The display device of claim 16, wherein the second mark is one of second marks, the second virtual line crosses each of the second marks in the plan view of the display device, and the number of the second marks is smaller than the number of the first marks.",
"20. The display device of claim 16, wherein the first virtual line is perpendicular to the second virtual line."
],
"description_excerpt": "The present invention relates to a substrate for a display device and a method for depositing a thin film.\n\nAn organic light emitting display typically includes a substrate and a plurality of pixels formed on the substrate. Each of the pixels includes a pixel circuit and an organic light emitting diode of which emission may be controlled by the pixel circuit. The organic light emitting diode may have a stacked structure that may include a pixel electrode, an organic emission layer, and (a portion of) a common electrode. The organic light emitting display may use lights emitted from a plurality of organic light emitting diodes to display an image.\n\nThe organic emission layer may be formed using a pattern mask that has a plurality of openings corresponding to a design of the organic emission layer. The pattern mask may be fixed to a frame with a tensile force being applied to the pattern mask. The combination of the mask and the frame may be arranged on the substrate inside a chamber. A deposition source may also be disposed inside the chamber. An organic material evaporated from the deposition source may pass through the opening of the pattern mask and may be deposited on the substrate so as to form the organic emission layer.\n\nDuring the deposition process, if an error occurs in the alignment between the substrate and the pattern mask, the error may cause a process failure. Therefore, accuracy in the alignment between the substrate and the pattern mask is very important in manufacturing the organic light emitting display.",
"cpc": [
"H10W 46/00",
"G09F 9/00",
"H01L 2223/5442",
"H01L 2223/54426",
"H01L 2223/54486",
"H01L 23/544",
"H01L 27/3211",
"H01L 27/3246",
"H01L 2924/00",
"H01L 2924/0002",
"H01L 51/0002",
"H01L 51/0012",
"H01L 51/56",
"H10K 59/122",
"H10K 59/35",
"H10K 71/10",
"H10K 71/166",
"H10K 71/191",
"H10K 71/40",
"H10W 46/101",
"H10W 46/301",
"H10W 46/607"
],
"ipc": [
"H01L 23/544",
"H10K 99/00"
],
"assignees": [
"Samsung Display Co Ltd"
],
"inventors": [
"Cheol-Gyu JEONG"
],
"filing_date": "2019-12-16",
"publication_date": "2021-08-10",
"grant_date": "2021-08-10",
"priority_date": "2013-05-30",
"application_number": "US-201916716428-A",
"family_id": "51984080",
"cited_by_count": 2,
"citations": [
"KR20050101578A",
"US7498745B2",
"KR20060102094A",
"KR20070097218A",
"US20100026173A1",
"US20100245271A1",
"US20110234550A1",
"US20120154722A1",
"US20140131667A1",
"US20140239049A1",
"US10541368B2",
"US20160343944A1",
"US20190044070A1"
]
}
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