MLchartDataset catalogue

Wafer cleaning

Term · Environment · MLC-T-ENV-029884

Process type that consists of any production process using fluorinated GHG reagents to clean wafers at any step during production.

Table 1. Record
IdentifierMLC-T-ENV-029884
FieldEnvironment
SubjectCommercial processes
References40 CFR 98.98 (CFR 2013)
Record as JSON 
{
  "id": "MLC-T-ENV-029884",
  "term": "Wafer cleaning",
  "field": "Environment",
  "term_source": "Wafer Cleaning",
  "definition": "Process type that consists of any production process using fluorinated GHG reagents to clean wafers at any step during production.",
  "subject": "Commercial processes",
  "references": [
    "40 CFR 98.98 (CFR 2013)"
  ],
  "url": "https://mlchart.com/terminology/environment/wafer-cleaning/"
}

Record 29,062 of 29,894 in Environment terminology (MLC-0121). Request the full dataset.