MLchartDataset catalogue

Wafer Pass

Term · Environment · MLC-T-ENV-029886

Count of the number of times a wafer substrate is processed in a specific process recipe, sub-type, or type. The total number of wafer passes over a reporting year is the number of wafer passes per tool multiplied by the number of operational process tools in use during the reporting year.

Table 1. Record
IdentifierMLC-T-ENV-029886
FieldEnvironment
References40 CFR 98.98 (CFR 2013)
Record as JSON 
{
  "id": "MLC-T-ENV-029886",
  "term": "Wafer Pass",
  "field": "Environment",
  "definition": "Count of the number of times a wafer substrate is processed in a specific process recipe, sub-type, or type. The total number of wafer passes over a reporting year is the number of wafer passes per tool multiplied by the number of operational process tools in use during the reporting year.",
  "references": [
    "40 CFR 98.98 (CFR 2013)"
  ],
  "url": "https://mlchart.com/terminology/environment/wafer-pass/"
}

Record 29,886 of 30,736 in Environment terminology (MLC-0121). Request the full dataset.