MLchartDataset catalogue

ISO 14644

Term · Semiconductors · MLC-T-SEM-000185

A series of international standards that specify the classification of air cleanliness in cleanrooms and associated controlled environments. These standards define the maximum concentration of airborne particles of specified sizes per cubic meter of air. Different parts of ISO 14644 cover aspects such as design, construction, and operation of cleanrooms.

Table 1. Record
IdentifierMLC-T-SEM-000185
FieldSemiconductors
SubjectCleanroom, Contamination & EHS
Record as JSON
{
  "id": "MLC-T-SEM-000185",
  "term": "ISO 14644",
  "field": "Semiconductors",
  "definition": "A series of international standards that specify the classification of air cleanliness in cleanrooms and associated controlled environments. These standards define the maximum concentration of airborne particles of specified sizes per cubic meter of air. Different parts of ISO 14644 cover aspects such as design, construction, and operation of cleanrooms.",
  "subject": "Cleanroom, Contamination & EHS",
  "url": "https://mlchart.com/terminology/semiconductors/iso-14644/"
}

Record 189 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.