Clean dry air
Term · Semiconductors · MLC-T-SEM-000062
Highly purified compressed air (CDA) with moisture, oil, and particulate contaminants removed to stringent specifications. It is distributed throughout a fabrication facility to power pneumatic components of manufacturing equipment, such as valves, actuators, and robotic arms. The quality standard for CDA is defined by ISO 8573-1, which specifies maximum allowable levels for particles, water, and oil.
| Identifier | MLC-T-SEM-000062 |
|---|---|
| Field | Semiconductors |
| Subject | Facilities, Vacuum & Chemicals |
| Abbreviation | CDA |
Record as JSON
{
"id": "MLC-T-SEM-000062",
"term": "Clean dry air",
"field": "Semiconductors",
"definition": "Highly purified compressed air (CDA) with moisture, oil, and particulate contaminants removed to stringent specifications. It is distributed throughout a fabrication facility to power pneumatic components of manufacturing equipment, such as valves, actuators, and robotic arms. The quality standard for CDA is defined by ISO 8573-1, which specifies maximum allowable levels for particles, water, and oil.",
"abbreviation": "CDA",
"subject": "Facilities, Vacuum & Chemicals",
"url": "https://mlchart.com/terminology/semiconductors/clean-dry-air/"
}
Record 55 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.