MLchartDataset catalogue

Clean dry air

Term · Semiconductors · MLC-T-SEM-000062

Highly purified compressed air (CDA) with moisture, oil, and particulate contaminants removed to stringent specifications. It is distributed throughout a fabrication facility to power pneumatic components of manufacturing equipment, such as valves, actuators, and robotic arms. The quality standard for CDA is defined by ISO 8573-1, which specifies maximum allowable levels for particles, water, and oil.

Table 1. Record
IdentifierMLC-T-SEM-000062
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
AbbreviationCDA
Record as JSON
{
  "id": "MLC-T-SEM-000062",
  "term": "Clean dry air",
  "field": "Semiconductors",
  "definition": "Highly purified compressed air (CDA) with moisture, oil, and particulate contaminants removed to stringent specifications. It is distributed throughout a fabrication facility to power pneumatic components of manufacturing equipment, such as valves, actuators, and robotic arms. The quality standard for CDA is defined by ISO 8573-1, which specifies maximum allowable levels for particles, water, and oil.",
  "abbreviation": "CDA",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/clean-dry-air/"
}

Record 55 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.