MLchartDataset catalogue

Dry pump

Term · Semiconductors · MLC-T-SEM-000101

A mechanical vacuum pump that operates without any oil or other liquids in the gas path to create a vacuum. These pumps use tightly toleranced, rotating mechanisms like screws, lobes, or claws to compress and exhaust gas from a chamber. Unlike wet pumps, dry pumps eliminate the risk of oil backstreaming and hydrocarbon contamination of the process environment.

Table 1. Record
IdentifierMLC-T-SEM-000101
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000101",
  "term": "Dry pump",
  "field": "Semiconductors",
  "definition": "A mechanical vacuum pump that operates without any oil or other liquids in the gas path to create a vacuum. These pumps use tightly toleranced, rotating mechanisms like screws, lobes, or claws to compress and exhaust gas from a chamber. Unlike wet pumps, dry pumps eliminate the risk of oil backstreaming and hydrocarbon contamination of the process environment.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/dry-pump/"
}

Record 98 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.