MLchartDataset catalogue

Gas cabinet

Term · Semiconductors · MLC-T-SEM-000147

A ventilated enclosure designed to safely store and deliver hazardous process gases to semiconductor manufacturing equipment. It provides containment for gas cylinders, leak detection, and automatic shutdown mechanisms in case of a gas leak. These cabinets are constructed with fire-resistant materials and often include purge systems to clear lines before cylinder changes.

Table 1. Record
IdentifierMLC-T-SEM-000147
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000147",
  "term": "Gas cabinet",
  "field": "Semiconductors",
  "definition": "A ventilated enclosure designed to safely store and deliver hazardous process gases to semiconductor manufacturing equipment. It provides containment for gas cylinders, leak detection, and automatic shutdown mechanisms in case of a gas leak. These cabinets are constructed with fire-resistant materials and often include purge systems to clear lines before cylinder changes.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/gas-cabinet/"
}

Record 146 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.