Toxic gas monitoring

{
  "id": "MLC-T-SEM-000388",
  "term": "Toxic gas monitoring",
  "field": "Semiconductors",
  "definition": "The continuous surveillance of the ambient air in semiconductor fabrication facilities for the presence of hazardous gases that could pose a risk to personnel or equipment. This monitoring, abbreviated as TGM, involves a network of sensors strategically placed to detect leaks or accidental releases of toxic process gases, such as arsine, phosphine, or silane. Alarm systems are integrated to alert personnel and initiate safety protocols upon detection of gas concentrations exceeding predefined exposure limits.",
  "abbreviation": "TGM",
  "subject": "Cleanroom, Contamination & EHS",
  "url": "https://mlchart.com/terminology/semiconductors/toxic-gas-monitoring/"
}