MLchartDataset catalogue

Track

Term · Semiconductors · MLC-T-SEM-000389

A large, integrated system that automates the coating, baking, and developing of photoresist on wafers before and after exposure in a photolithography scanner. The track system transports wafers through a series of modules for vapor priming, resist coating, soft baking, post-exposure baking, and developing. These systems are directly interfaced with the exposure tool to form a closed, automated lithography cell, minimizing handling and contamination.

Table 1. Record
IdentifierMLC-T-SEM-000389
FieldSemiconductors
SubjectLithography & Patterning
Record as JSON 
{
  "id": "MLC-T-SEM-000389",
  "term": "Track",
  "field": "Semiconductors",
  "definition": "A large, integrated system that automates the coating, baking, and developing of photoresist on wafers before and after exposure in a photolithography scanner. The track system transports wafers through a series of modules for vapor priming, resist coating, soft baking, post-exposure baking, and developing. These systems are directly interfaced with the exposure tool to form a closed, automated lithography cell, minimizing handling and contamination.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/track/"
}

Record 357 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.