MLchartDataset catalogue

Cluster tool

Term · Semiconductors · MLC-T-SEM-000064

A semiconductor manufacturing system comprising multiple process chambers connected to a central wafer handling robot in a vacuum environment. This configuration allows for sequential processing steps without breaking vacuum, reducing contamination and improving throughput. Each chamber within a cluster tool can perform a different operation, such as etching, deposition, or annealing.

Table 1. Record
IdentifierMLC-T-SEM-000064
FieldSemiconductors
SubjectEquipment & Automation
Record as JSON 
{
  "id": "MLC-T-SEM-000064",
  "term": "Cluster tool",
  "field": "Semiconductors",
  "definition": "A semiconductor manufacturing system comprising multiple process chambers connected to a central wafer handling robot in a vacuum environment. This configuration allows for sequential processing steps without breaking vacuum, reducing contamination and improving throughput. Each chamber within a cluster tool can perform a different operation, such as etching, deposition, or annealing.",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/cluster-tool/"
}

Record 57 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.