MLchartDataset catalogue

Recipe

Term · Semiconductors · MLC-T-SEM-000282

A set of pre-programmed instructions that controls a specific semiconductor manufacturing process step on a piece of equipment. The recipe defines all parameters, such as gas flow rates, pressure, temperature, and process time, required to perform an action like etching or deposition. A process engineer creates and tests recipes, which are stored on the tool or in a central factory control system.

Table 1. Record
IdentifierMLC-T-SEM-000282
FieldSemiconductors
SubjectFront-End Process
Record as JSON 
{
  "id": "MLC-T-SEM-000282",
  "term": "Recipe",
  "field": "Semiconductors",
  "definition": "A set of pre-programmed instructions that controls a specific semiconductor manufacturing process step on a piece of equipment. The recipe defines all parameters, such as gas flow rates, pressure, temperature, and process time, required to perform an action like etching or deposition. A process engineer creates and tests recipes, which are stored on the tool or in a central factory control system.",
  "subject": "Front-End Process",
  "url": "https://mlchart.com/terminology/semiconductors/recipe/"
}

Record 292 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.