Mass flow controller

{
  "id": "MLC-T-SEM-000211",
  "term": "Mass flow controller",
  "field": "Semiconductors",
  "definition": "A device that precisely measures and controls the flow rate of gases in semiconductor manufacturing processes. It maintains a constant flow regardless of pressure fluctuations, which is vital for repeatable and stable deposition, etching, and doping. MFCs typically operate by sensing heat transfer from a heated tube or by measuring pressure drop across a laminar flow element.",
  "abbreviation": "MFC",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/mass-flow-controller/"
}