MLchartDataset catalogue

Pirani gauge

Term · Semiconductors · MLC-T-SEM-000251

A thermal conductivity vacuum gauge that measures pressure by detecting changes in the heat loss from a heated filament to the surrounding gas. As pressure decreases, fewer gas molecules are present to conduct heat away, causing the filament temperature to rise. Pirani gauges are effective in the medium vacuum range, typically from 1000 Torr down to 10^-4 Torr.

Table 1. Record
IdentifierMLC-T-SEM-000251
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000251",
  "term": "Pirani gauge",
  "field": "Semiconductors",
  "definition": "A thermal conductivity vacuum gauge that measures pressure by detecting changes in the heat loss from a heated filament to the surrounding gas. As pressure decreases, fewer gas molecules are present to conduct heat away, causing the filament temperature to rise. Pirani gauges are effective in the medium vacuum range, typically from 1000 Torr down to 10^-4 Torr.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/pirani-gauge/"
}

Record 260 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.