MLchartDataset catalogue

Turbomolecular pump

Term · Semiconductors · MLC-T-SEM-000341

A type of vacuum pump that uses rapidly rotating blades to impart momentum to gas molecules, directing them towards the exhaust. These pumps achieve high vacuum and ultra-high vacuum levels by compressing gas molecules through multiple stages. Turbomolecular pumps typically require a backing pump to operate effectively, as they cannot exhaust directly to atmosphere.

Table 1. Record
IdentifierMLC-T-SEM-000341
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
AbbreviationTurbo
Record as JSON 
{
  "id": "MLC-T-SEM-000341",
  "term": "Turbomolecular pump",
  "field": "Semiconductors",
  "definition": "A type of vacuum pump that uses rapidly rotating blades to impart momentum to gas molecules, directing them towards the exhaust. These pumps achieve high vacuum and ultra-high vacuum levels by compressing gas molecules through multiple stages. Turbomolecular pumps typically require a backing pump to operate effectively, as they cannot exhaust directly to atmosphere.",
  "abbreviation": "Turbo",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/turbomolecular-pump/"
}

Record 360 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.