MLchartDataset catalogue

Interlock

Term · Semiconductors · MLC-T-SEM-000177

A safety mechanism that prevents a piece of equipment from operating or performing a specific function unless certain conditions are met. In semiconductor manufacturing, interlocks protect personnel from hazards like high voltage or moving parts, and prevent process errors. For example, a chamber door interlock prevents vacuum pump operation if the door is open.

Table 1. Record
IdentifierMLC-T-SEM-000177
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000177",
  "term": "Interlock",
  "field": "Semiconductors",
  "definition": "A safety mechanism that prevents a piece of equipment from operating or performing a specific function unless certain conditions are met. In semiconductor manufacturing, interlocks protect personnel from hazards like high voltage or moving parts, and prevent process errors. For example, a chamber door interlock prevents vacuum pump operation if the door is open.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/interlock/"
}

Record 180 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.